Behaviour-attentive prototyping of a design and simulation system for IC chambers

Hou,Yuemin,Ji,Linhong,Sun,Yunchun,Lin,Jia,Horvath,Imre,Rusak,Zoltan
2015-01-01
Abstract:This paper proposes a method of behaviour-attentive prototyping (BAP). BAP differentiates an approach of prototyping that provides a comprehensive description of the main features of the evolving system based on the conjoint behaviours of users, computers, and the designed system. The goal of BAP is to produce a rough working model of the designed system. The method has been developed with a view to and is intended to be used primarily, but not exclusively, in the early development of design systems of processing chambers of integrated circuit (IC) equipment. The method uses a behaviours tracking strategy. It involves five steps: (1) construction of behaviour space; (2) reasoning with the sequence of behaviours; (3) behaviour decomposition; (4) behaviour prototyping; (5) validation on computer. The BAP approach is interested not only in how the system is configured and manifest, but also in what it operates and how it behaves.
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