Configuring Agents for the Design of Chamber Systems of Ic Equipments

Hou Yuemin,Ji Linhong

DOI: https://doi.org/10.4028/www.scientific.net/amm.490-491.498

2014-01-01

Applied Mechanics and Materials

Abstract:The availability of multi-fields simulation and rapid design is at core of a competitive design ability of chamber systems for IC (integrated Circuit) manufacturing. A computer system is required to provide rapid response for both new designs and processing validations, so programming the design and simulation procedure is necessary. However, some steps of the design and simulation procedure are not clear in the initial design stage in many cases. They only can be decided when part of the structure is visible, particularly when novel structures or new working principles are used. The use of agents is one way to collect information that is required but cannot be pre-programmed in computers. This paper presents a generic method to configure agents, including an analysis framework using a six stage design process, the agent analysis for general design and simulation process, the procedures of design and processing simulation of chambers, the configuration of agents, and finally the conclusion and further works. This paper contributes a generic agent design method.