Abstract:A seamless chip-to-world photonic interface enables wide-ranging advancements in optical ranging, display, communication, computation, imaging, and light-matter interaction. An optimal solution allows for 2D scanning of a diffraction-limited beam from anywhere on a photonic chip over a large number of beam-spots in free-space. Currently, devices with direct PIC integration rely on tiled apertures with poor mode qualities, large footprints, and complex control systems. Micro-mechanical beam scanners have good beam quality but lack direct PIC integration and are inertially-limited due to the use of bulk optical components or structures in which the optical aperture and actuator sizes are inextricably linked, resulting in trade-offs among resolution, speed, and footprint. Here, we overcome these limitations with the photonic "ski-jump": a nanoscale optical waveguide monolithically integrated atop a piezoelectrically actuated cantilever which passively curls ~90$^{\circ}$ out-of-plane in a footprint of <0.1 mm$^{2}$, emits sub-micron diffraction-limited optical modes, and exhibits kHz-rate mechanical resonances with quality factors exceeding 10,000. This enables two-dimensional beam-scanning with footprint-adjusted spot-rates of 68.6 mega-spots/(s$\cdot$mm$^{2}$) at CMOS-level voltages, which is equivalent to a 1 megapixel display at 100 Hz from a 1.5 mm$^{2}$ footprint, and exceeds the performance of state-of-the-art MEMS mirrors by >50$\times$. Using this device, we demonstrate image projection, video projection, and the initialization and readout of single photons from silicon vacancy centers in diamond waveguides. Based on current performance, we identify pathways for achieving >1 giga-spots at kHz-rates in a ~1 cm$^{2}$ area to provide a seamless, scalable optical pipeline between integrated photonic processors and the free-space world.

Integrated Wavelength Beam Emitter on Silicon for Two-Dimensional Optical Scanning

Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

A Fully Solid-State Beam Scanner for FMCW LiDAR Application

Design of a Beam-coupling System for a Chip-integrated Spectrometer with a Discrete Linear Waveguide

Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

Nanophotonic waveguide chip-to-free-space beam scanning at 68 Million Spots/(s$\cdot$mm$^{2}$)

Two-dimensional Beam Steering Based on Hitless Wavelength-Selective Switch Array

A Hybrid Solid-State Beam Scanner for LiDAR Applications

High‐Resolution 2D Quasi‐Distributed Optical Sensing with On‐Chip Multiplexed FSR‐Free Nanobeam Cavity Array

Microcantilever-integrated photonic circuits for broadband laser beam scanning

On-chip Wavefront Shaping in Spacing-Varied Waveguide Arrays

Solid-State Slow-Light Beam Scanner With Ultra-Large Field of View and High Resolution

Hitless Two-Dimensional Focal Plane Switch Array Based on MZI-embedded MRRs

Silicon-based high-resolution and low-power-consumption two-dimensional beam scanner integrated with hybrid wavelength-tunable laser diode

Wavelength-division multiplexing Si photonic crystal beam steering device for high-throughput parallel sensing

Dually modulated photonic crystals enabling high-power high-beam-quality two-dimensional beam scanning lasers

A Hybrid Solid-State Beam Scanner for FMCW LiDAR Application.

Beam-Steering Based on Dispersive Optical Phased Array for FMCW LiDAR Application

Imaging Spectrometers Based on Waveguide Echelle Diffraction Gratings

Silicon Optical Phased Array with High-Efficiency Beam Formation over 180 Degree Field of View

Two-dimensional beam-steering device using a doubly periodic Si photonic-crystal waveguide