Abstract:We achieved high performance high speed silicon photonics carrier-depletion Mach-Zehnder modulation with commercial foundry by co-optimization of doping and device design assisted with an accurate electro-optical (EO) model. We demonstrated high performance IQ modulators operating at 85 Gbaud 16 QAM and 64 Gbaud 64 QAM with extinction ratio of over 25 dB. For the design of the high performance all-silicon carrier depletion modulator, we developed modeling and design tools to provide not only accuracy, but also efficiency in the simulation of distributed optical and electronic characteristics of travelling waveguides with different designs of optical and microwave waveguides under various doping conditions, which allow the co-design of velocity phase match between optical and microwave waveguides and the impedance match between microwave travelling waveguide and terminal impedance. Our experimental characterization test data agreed well with the model simulation data. More recently, with practical Nyquist filter and linear compensation in commercial arbitrary wave generator (AWG) and optical modulation analyzer (OMA), we demonstrated 100 Gbaud 32 QAM with an all-silicon IQ modulator, which has 6 dB electro-optical bandwidth of 50 GHz and BER achieving FEC threshold with a modern FEC, showing the potential for Tb/s applications.

Modeling a Dual-Parallel Silicon Modulator for Sinc-Shaped Nyquist Pulse Generation

Second Harmonic Distortion Comparison of Mach-Zehnder Silicon Modulators Based on Lateral and Interdigitated PN Junctions

High-Performance Electro-Optic Modulator on Silicon Nitride Platform with Heterogeneous Integration of Lithium Niobate

Microwave Pulse Generation with a Silicon Dual-Parallel Modulator

Modeling of a 200 KHz Bandwidth Low-pass Switch-capacitor Sigma-delta DAC with a Raised Spur-free Modulator

Repetition-Frequency-Doubled Transform-Limited Optical Pulse Generation Based on Silicon Modulators

Design and Electro-Optical Co-Optimization of High-Speed Travelling Wave Silicon-Organic Hybrid Modulators

Linearity Comparison of Silicon Carrier-Depletion-Based Single, Dual-Parallel, and Dual-Series Mach–Zehnder Modulators

A Silicon Optical Single Sideband Modulator with Ultra-High Sideband Suppression Ratio

Accurate High-Speed Eye Diagram Simulation of Silicon-Based Modulators

Improving the Linearity of Silicon Ring Modulators by Manipulating the Photon Dynamics

Trade-off Between Optical Modulation Amplitude and Modulation Bandwidth of Silicon Micro-Ring Modulators.

High Linearity Silicon Modulator Capable of Actively Compensating Input Distortion.

High-speed silicon modulator based on cascaded microring resonators.

A high linear silicon Mach-Zehnder modulator by the dual-series architecture

High Speed Silicon Mach-Zehnder Modulator with Circuit Model Analysis

Improving the Linearity of Silicon Ring Modulators by Manipulating the Quality Factor and Operation Wavelength

Single Chip Silicon Single Sideband Modulator with High Sideband Suppression Ratio

Performance Influence of FCA and Nonlinear FCD to the Mach-Zehnder-Interference Based Silicon DPSK Generation

High-speed Silicon Modulators for the 2 Μm Wavelength Band

High Baud Rate All-Silicon Photonics Carrier Depletion Modulators