A MEMS Piezoelectric Vibration Energy Harvester Based on Trapezoidal Cantilever Beam Array

Xianming He,Quan Wen,Zhiyu Wen,Xiaojing Mu
DOI: https://doi.org/10.1109/mems46641.2020.9056434
2020-01-01
Abstract:This paper reports a novel MEMS piezoelectric vibration energy harvester based on trapezoidal cantilever beam array (TCBA-PVEH), which mainly composed of a pie/oelectric an-ay beam and a mass block. The open-circuit voltage (V-oc), the optimized load voltage (V-opt) and the optimized load output power (Popt) of the TCBA-PVEH at 0.5g acceleration can reach 10.36 V, 6.68 V and 12.51 mu W, respectively. The experimental results show that the TCBA-PVEH has smaller bending stiffness and larger piezoelectric strain energy per unit area than the rectangular cantilever beam array based PVEH (RCBA-PVEH), thus having lower resonance frequency and better electrical output. We also establish and analytically solve the electromechanical coupling dynamic model of PVEHs with variable cross-section cantilever beam. The proposed model lays an important theoretical foundation for structural optimization design, performance improvement and output prediction.
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