High-Voltage MEMS Plasma Switch for Boosting the Energy Transfer Efficiency in Triboelectric Nanogenerators

Hemin Zhang,Frederic Marty,Dimitri Galayko,Naida Hodzic,Philippe Basset
DOI: https://doi.org/10.1109/mems46641.2020.9056156
2020-01-01
Abstract:This paper presents for the first time a high-voltage MEMS plasma switch for boosting the energy transfer efficiency of conditioning circuits for triboelectric nanogenerators (TENGs). The novel MEMS switch has a narrow-hysteresis loop for a permanent high-efficiency energy conversion thanks to the combination of electrostatic actuation and plasma-discharge. At the same time, the converted energy is automatically transferred to a low-voltage reservoir through a buck converter. The experimental results show that the MEMS switch improves the harvesting efficiency by two orders of magnitude (145 times) compared to the conventional full-wave rectifying circuit architecture.
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