Synchronously Actuated Electrostatic Mems Switch for Efficient Energy Management of Triboelectric Nanogenerator

Yingying Li,Guoxu Liu,Han Zhou,Zhenci Sun,Yiming Dai,Zefang Dong,Zheng Wang,Chi Zhang,Xiaofeng Wang,Jiahao Zhao
DOI: https://doi.org/10.2139/ssrn.4385385
2023-01-01
Abstract:The triboelectric nanogenerator (TENG) by harvesting environmental mechanical energy provides a viable power supply solution for self-powered systems in the development of the Internet of Things (IoT). However, the efficient energy management strategies for TENGs are still under investigation, especially in the low-frequency working mode. In this paper, a synchronously actuated 4-ternimal MEMS switch is introduced to realize an autonomous energy management system to improve the energy efficiency of a dual-output TENG. One output channel acts as a controller to accurately control the state of the MEMS switch-circuit, and the other output channel is responsible for extracting the electric energy to the back-end circuit in maximum. The experimental results indicate that the energy extraction efficiency of the system can reach ~81% under 1~2 Hz, with the accurate control of the electrostatic switch and lower intrinsic leakage rate compared to the conventional electronic circuit. Moreover, a buck converter circuit with the MEMS switch can achieve an ultrahigh energy supply efficiency which is 4.89 times higher than that of an ordinary rectifier circuit without switch. This work provides an energy management solution for TENGs with MEMS switches, which has promising applications in improving the efficiency of energy utilization in TENG-driven electronics.
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