Abstract:Polymers have been widely used in the fabrication of humidity sensing materials, although, issues including sensitivity and hysteresis still exist, limiting its potential. Herein, we aim to enhance the humidity sensing performances of a polyimide (PI) capacitive-type relative-humidity sensor via a simple and efficient approach. Specifically, modified halloysite nanotubes (HNTs) were doped in the polyimide sensing layer to optimize the humidity sensing capabilities of the MEMS (Micro-electromechanical Systems)-based sensor. The configurational and morphological characteristic of the sensing membrane with different content of the nanofiller were characterized. The humidity sensing capabilities of the enhanced sensors were investigated under the relative humidity (RH) range of 10–90%. Owing to the rational structure design of the sensing layer, the modified sensor exhibited enhanced sensitivity, low humidity hysteresis and good linearity. The highest sensitivity of the device with the best overall performance reached 0.87 pF/%RH, which is 1.81 times that of the pure PI based humidity sensor. Meanwhile, the sensor maintained moderate humidity hysteresis (2.18%) as well as good linearity (R 2 = 0.9813) within the humidity boundary from 10 to 90% RH. The aforementioned advantages of the PI-HNTs-NH 2 based humidity sensor demonstrate its promising application in humidity measurement. As a low-cost and effective additive, HNTs own great application potential in the preparation of polymer sensing devices. This work provides valuable guidance for fabricating humidity sensors with outstanding sensing performances.

Capacitive Humidity Sensors Based on Mesoporous Silica and Poly(3,4-Ethylenedioxythiophene) Composites.

Multi-functional Flexible Sensor Based on Composite of Polyimide Aerogel and TiO2 Nanoparticles with Applications in Humidity Sensing, Water Sensing in Liquid and Photocatalysis

A composite of quaternized and crosslinked poly(4-vinylpyridine) with processable polypyrrole for the construction of humidity sensors with improved sensing properties

High-Performance Porous MIM-type Capacitive Humidity Sensor Realized Via Inductive Coupled Plasma and Reactive-Ion Etching

Humidity Sensors Based on MCM-41/polypyrrole Hybrid Film Via In-Situ Polymerization

Humidity Sensor Based on Solution Processible Microporous Silica Nanoparticles

Ultrasensitive Humidity Sensors with Synergy between Superhydrophilic Porous Carbon Electrodes and Phosphorus-Doped Dielectric Electrolyte

High-Sensitivity And Low-Hysteresis Porous Mim-Type Capacitive Humidity Sensor Using Functional Polymer Mixed With Tio2 Microparticles

Humidity sensitive properties of a novel soluble conjugated copolymer: ethynylbenzene-co-propargyl alcohol

An enhanced MEMS-based polyimide capacitive-type relative-humidity sensor with halloysite nanotube as a modifier

Humidity sensors based on octaphenylcyclotetrasiloxane hypercrosslinked porous polymers for non-contact sensing and respiratory monitoring

Poly(4-vinylpyridine)/carbon Black Composite As a Humidity Sensor

Organic-Inorganic Hybrid Materials Based on Mesoporous Silica Derivatives for Humidity Sensing

Humidity sensitive properties and sensing mechanism of π-conjugated polymer p-diethynylbenzene-co-propargyl alcohol

Electrospun nanofibers of polymer composite as a promising humidity sensitive material

Synthesis and Humidity Sensitive Properties of Pyrrole‐based Polyelectrolytes

A PEDOT:PSS Functionalized Capacitive Sensor for Humidity

Flexible humidity sensor based on crosslinked polyethyleneimine/tannic acid and porous carbonaceous interdigitated electrode

Strip-type flexible capacitive humidity sensor based on composite of polyimide and poly(glycidyl methacrylate): Fabrication, humidity sensitive performance and potential for detecting water content in liquids

Ultrasensitive and flexible humidity sensors fabricated by ion beam sputtering and deposition from polydimethylsiloxane

An Optical Humidity Sensor Based on Cdte Nanocrystals Modified Porous Silicon