Film Thickness Gauge Based on Interferometric Principle of Y-shaped Optical Fiber
Juntao He,Yikai Dang,Haoqi Wang,Shaohua Wang,Yingke Li,Ruiyun Ma,Yingyuan Li,Peilin Gao,Jianguo Cao,Yong Pan
2024-12-10
Abstract:In this paper, a thin film thickness gauge based on the interferometric principle of Y-shaped optical fiber is proposed to achieve accurate measurement of film thickness. In this paper, the optical fiber, the interferometric principle and the film thickness calculation principle are introduced, and the interferometric thickness measurement system based on Y-shaped optical fiber is constructed. The system uses the special structure of Y-shaped optical fiber to transmit the optical signal generated by the light source to the surface of the thin film, and obtains coherent optical signals of different wavelengths through reflection and interference. The spectrometer is used to receive and interpret these interference signals, and the thickness of the film is calculated according to the wavelength difference of the peak positions of the adjacent stages, combined with the refractive index of the film. In the specific design, the paper elaborates on the design of each part of the instrument, including the selection and parameter setting of the light source, Y-fiber and spectrometer. Among them, the Y-shaped optical fiber, as the core component of the instrument, has the function of transmitting optical signals and detecting optical signals on the surface of thin films. At the same time, the paper also introduces the housing packaging and internal assembly process of the instrument to ensure the portability and stability of the instrument. The results show that the thickness gauge has high measurement accuracy and stability, which can meet the needs of practical applications.
Optics