Ionization wave propagation characteristics under different polarity of pulse waveforms in micro-DBD device driven by bipolar nanosecond pulse waveform

Yaogong Wang,Xiaoqin Ma,Long Hu,Xuan Zhou,Zhenxing Wang,Xiaoning Zhang
DOI: https://doi.org/10.1063/1.5096547
IF: 2.2
2019-01-01
Physics of Plasmas
Abstract:Different spatiotemporal modes of ionization wave propagation at opposite polarity of bipolar pulses in a micro-dielectric barrier discharge structure device are investigated. The device is fabricated on a heavily doped n-type silicon substrate, and a 1cm x 1cm square cavity is formed on the 180 mu m-thick polyimide film. Different modes of ionization wave propagation determined by the polarity of bipolar pulses are observed, and the details of streamerlike mode and wavelike mode under positive and negative half cycles of pulses are investigated, respectively. The propagation speeds of streamerlike ionization waves and wavelike ionization waves are similar to 120km/s and similar to 40km/s on average and similar to 150km/s and similar to 70km/s in maximum, respectively. Different parameters of bipolar pulses, especially the rising time of pulses, are applied to the proposed device to explore the variation of ionization wave propagation properties. The results show that the modes of the ionization wave propagation are barely changed when the device is driven by different rising time pulses. However, the initial plasma generation time and propagation speed are greatly changed. With a decrease in the rising time from 400ns to 50ns, the initial plasma generation time is brought forward over 200ns, and the ionization wave propagation speed is improved over 30% for both cases. The results imply great significance in the exploration of the dynamics of plasma discharge evolution and regulation of plasma discharge properties through manipulating the pulse parameters.
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