Abstract:The Ni‐PTFE mold is a nanocomposite mold fabricated by one‐pot electroforming using anodic aluminum oxide (AAO) foil as a template. It has low surface energy and low surface wettability, enabling precise, defect‐free nanopatterns down to 100 nm over 20 cycles of thermal nanoimprinting (T‐NIL). UV‐NIL also succeeded, with the nanocomposite mold exhibiting superior demolding compared to a silane‐coated Ni mold. Nanoimprinting large‐area structures, especially high‐density features like meta lenses, poses challenges in achieving defect‐free nanopatterns. Conventional high‐resolution molds for nanoimprinting are often expensive, typically constructed from inorganic materials such as silicon, nickel (Ni), or quartz. Unfortunately, replicated nanostructures frequently suffer from breakage or a lack of definition during demolding due to the high adhesion and friction at the polymer‐mold interface. Moreover, mold degradation after a limited number of imprinting cycles, attributed to contamination and damaged features, is a common issue. In this study, a disruptive approach is presented to address these challenges by successfully developing an anti‐sticking nanocomposite mold. This nanocomposite mold is created through the co‐deposition of nickel atoms and low surface tension polytetrafluoroethylene (PTFE) nanoparticles via electroforming. The incorporation of PTFE enhances the ease of polymer release from the mold. The resulting Ni‐PTFE nanocomposite mold exhibits exceptional lubrication properties and a significantly reduced surface energy. This robust nanocomposite mold proves effective in imprinting fine, densely packed nanostructures down to 100 nm using thermal nanoimprinting for at least 20 cycles. Additionally, UV nanoimprint lithography (UV‐NIL) is successfully performed with this nanocomposite mold. This work introduces a novel and cost‐effective approach to reusable high‐resolution molds, ensuring defect‐reduction production in nanoimprinting.

A Titanium-Nickel Composite Mold with Low Surface Energy for Thermal Nanoimprint Lithography

Toward Defect‐Free Nanoimprinting

Surface Wettability and Tribological Performance of Ni-based Nanocomposite Moulds against Polymer Materials

Surface energy-tunable iso decyl acrylate based molds for low pressure-nanoimprint lithography

Making Modified Fluoropolymer Molds for Ultraviolet Nanoimprint Lithography

A Rapid Thermal Nanoimprint Apparatus Through Induction Heating Of Nickel Mold

Pulse current electroforming of Ni-PTFE nanocomposite mold insert with long-lifetime and anti-adhesive properties

A Simplified Microfabrication Technology for Production of Nickel Mold Insert for Replicating of Plastic Microfluidic Chips

Study of Hot Embossing Using Nickel and Ni–PTFE LIGA Mold Inserts

Study and Application of A New Si-Containing Acrylate Resist for Nanoimprinting Lithography

Large Area Mold Fabrication for the Nanoimprint Lithography Using Electron Beam Lithography

Molds for Nanoimprinting Made by Modified Photoresist

Fabrication of LIGA Mold Insert Using Ni-PTFE Composite Micro-Electroforming

A "thiol-ene" photo-curable hybrid fluorinated resist for the high-performance replica mold of nanoimprint lithography (NIL)

High-Temperature Imprinting and Superhydrophobicity of Micro/Nano Surface Structures on Metals Using Molds Fabricated by Ultrafast Laser Ablation

Injection molding of high aspect ratio sub-100 nm nanostructures

Additive Manufacturing of High-Performance Ni-Co Coatings for Micro/nanomold Applications Using an Advanced Gradient Ultrasonic Electrochemical Deposition Process

Experimental Investigation and Molecular Dynamics Simulation on the Anti-Adhesion Behavior of Alkanethiols on Nickel Insert in Micro Injection Molding

A Replication Strategy for Complex Micro/Nanostructures with Superhydrophobicity and Superoleophobicity and High Contrast Adhesion

Study of the Demolding Process - Implications for Thermal Stress, Adhesion and Friction Control

Study on nano-graphitic carbon coating on Si mold insert for precision glass molding