Ultra-thin Parylene-C Deposition on PDMS

Yaoping Liu,Xiao Dong,Xinyue Deng,Thuan Beng Saw,Chwee Teck Lim,Jingquan Liu,Wei Wang
DOI: https://doi.org/10.1109/memsys.2019.8870876
2019-01-01
Abstract:This study reports the ultra-thin Parylene-C deposition on PDMS substrate for a controllable and reliable process of Parylene-C caulked PDMS (pcPDMS). This work covers the depositions on PDMS substrates with different prepolymer ratios (mass of base to curing agent, @ 10:1, 30: 1 and 50: 1). Stiffness could be modulated in a wide range via the proposed pcPDMS process. The prepared pcPDMS would find applications in biomedical studies, such as mechanobiology.
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