Abstract:Exploiting semiconductor fabrication techniques, natural carriers of quantum information such as atoms, electrons, and photons can be embedded in scalable integrated devices. Integrated optics provides a versatile platform for large-scale quantum information processing and transceiving with photons. Scaling up the integrated devices for quantum applications requires highperformance single-photon generation and photonic qubit-qubit entangling operations. However, previous demonstrations report major challenges in producing multiple bright, pure and identical single-photons, and entangling multiple photonic qubits with high fidelity. Another notable challenge is to noiselessly interface multiphoton sources and multiqubit operators in a single device. Here we demonstrate on-chip genuine multipartite entanglement and quantum teleportation in silicon, by coherently controlling an integrated network of microresonator nonlinear single-photon sources and linear-optic multiqubit entangling circuits. The microresonators are engineered to locally enhance the nonlinearity, producing multiple frequencyuncorrelated and indistinguishable single-photons, without requiring any spectral filtering. The multiqubit states are processed in a programmable linear circuit facilitating Bell-projection and fusion operation in a measurement-based manner. We benchmark key functionalities, such as intra-/inter-chip teleportation of quantum states, and generation of four-photon Greenberger-HorneZeilinger entangled states. The production, control, and transceiving of states are all achieved in micrometer-scale silicon chips, fabricated by complementary metal-oxide-semiconductor processes. Our work lays the groundwork for scalable on-chip multiphoton technologies for quantum computing and communication.

Generation of a Frequency-Degenerate Four-Photon Entangled State Using a Silicon Nanowire

Frequency-degenerate multi-photon entangled state generation with silicon.

Generation of Multiphoton Entangled Quantum States with a Single Silicon Nanowire

On-Chip Generation and Manipulation of Entangled Photons Based on Reconfigurable Lithium-Niobate Waveguide Circuits

Scalable generation and detection of on-demand W states in nanophotonic circuits

High Visibility Time-Energy Entangled Photons from a Silicon Nanophotonic Chip

Generation of Multiphoton Quantum States on Silicon

On-chip Generation of Time-and Wavelength-Division Multiplexed Multiple Time-Bin Entanglement.

Generation of entangled photon pairs from a silicon bichromatic photonic crystal cavity

Generation And Manipulation Of Multi-Photon Entangled States On A Silicon Photonic Device

Discrete Frequency Entangled Photon Pair Generation Based on Silicon Micro-ring Cavities

Generation and dynamic manipulation of frequency degenerate polarization entangled Bell states by a silicon quantum photonic circuit

Silicon-Nitride Platform for Narrowband Entangled Photon Generation

Entanglement Generation Using Cryogenic Integrated Four-Wave Mixing

On-Chip Multiplexed Multiple Entanglement Sources in a Single Silicon Nanowire

Programmable frequency-bin quantum states in a nano-engineered silicon device

On-Chip Enhanced Biphoton Generation with Incoherent Light

High-fidelity four-photon GHZ states on chip

On-chip generation of heralded photon-number states

On-Demand Semiconductor Source of Entangled Photons Which Simultaneously Has High Fidelity, Efficiency, and Indistinguishability

Chip-to-chip quantum teleportation and multi-photon entanglement in silicon