Low-Cost, Metal-Based Micro-Needle Electrode Array (M-Mnea): A Three-Dimensional Intracortical Neural Interface

Junshi Li,Dong Huang,Yufeng Chen,Zhihong Li
DOI: https://doi.org/10.1109/TRANSDUCERS.2019.8808276
2019-01-01
Abstract:This paper reports a novel intracortical neural interface comprising 10810 metal-based micro-needle electrode array (M-MNEA) with the pitch of 500 um, and the height ranging from hundreds of microns to millimeters. The diameters of the body and tip end of the needle are 200 mu m and similar to 10 mu m, respectively. The low-cost fabrication process of the device contains simple techniques and without any step of lithography or complex etching. Meanwhile, owing to the Au coating of the electrode sites and Parylene insulating layer on the needle bodies, the M-MNEA ensures the biocompatibility and safety compared with brittle silicon needles, which are at risk of breakage during implanting. Furthermore, the customized printed circuit board (PCB) design reserves the potential of active system integration. The results of basic electrical tests indicate the good stability and low contact impedance of the M-MNEA.
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