AN ULTRABROADBAND INFRARED OPTICAL MODULATOR OF 3D NANOANTENNA FABRICATED BY FOCUSED ION BEAM - STRESS INDUCED DEFORMATION

Xiaoyu Chen,Yifei Mao,Zhuojie Chen,Shengxiao Jin,Wengang Wu,Jun Xu,Rui Zhu
DOI: https://doi.org/10.1109/transducers.2019.8808796
2019-01-01
Abstract:A novel three-dimensional (3D) nanoantenna array, consisting of double-claw shape unit cell, is fabricated by focused ion beam stress-introduced deformation (FIB-SID) technique [1]-[3], and is employed as an ultrabroadband infrared (IR) optical modulator. The measured reflection spectra of the device show that an ultrabroadband infrared optical modulation can be achieved with tiny change of the double claw's distance. The relative modulation value calculated from reflection spectra for the nanoantenna with lager unit size indicates that a broad IR modulation range of 3.39 μm (2.93 μm - 6.32 μm) and a maximum modulation value of 17.5% at 5.8 μm is realized as the double claw's distance changes. Furthermore, the scaled down nanoantennas were also fabricated and measured, which covers a surprisingly ultrabroadband IR modulation range, from long-wave (9.93 μm) to short-wave (2.04 μm), and realizes a maximum modulation value of 71.7% at 3.29 μm as the double claw's distance changes about 180nm.
What problem does this paper attempt to address?