Abstract:Semiconductor nanomembranes (NMs) have emerged as an attractive nanomaterial for advanced electronic and photonic devices with attractive features such as transferability and flexibility, enabling heterogeneous integration of multi-functional components. Here, we demonstrate transferable single-layer GeSn NM resonant-cavity-enhanced photodetectors for 2 μm optical communication and multi-spectral short-wave infrared sensing/imaging applications. The single-layer strain-free GeSn NMs with an Sn concentration of 10% are released from a high-quality GeSn-on-insulator (GSOI) substrate with the defective interface regions removed. By transferring the GeSn NMs onto a predesigned distribution Bragg reflector (DBR)/Si substrate, a vertical microcavity is integrated into the device to enhance the light-matter interaction in the GeSn NM. With the integrated cavity and high-quality single-layer GeSn NM, a record responsivity of 0.51 A W-1 at 2 μm wavelength at room temperature is obtained, which is more than two orders of magnitude higher than the reported values of the multiple-layer GeSn membrane photodetectors without cavities. The potential of the device for multi-spectral photodetection is demonstrated by tuning the responsivity spectrum with different NM thicknesses. Theoretical simulations are utilized to analyze and verify the mechanisms of responsivity enhancement. The approach can be applied to other GeSn-NM-based active devices, such as electro-absorption modulators or light emitters, presenting a new pathway towards heterogeneous group-IV photonic integrated circuits with miniaturized devices.

Investigation of Semiconductor Nanomembrane with the Nanocavity Structure for Optoelectronic Devices

Analysis and Optimization of a Novel Laterally Deformable Optical NEMS Grating Transducer

Microcavity Enhanced Optical Absorption in Subwavelength Slits.

Influence of Geometry of Metallic Nanoparticles on Absorption of Thin-Film Organic Solar Cells: A Critical Examination.

Optical trait of unsymmetrical metal microcavity in organic thin film luminescent devices

Semiconductor nanomembrans and their 3D assemblies for sensitive optical detectors

Nanocavity Enhancement for Ultra-Thin Film Optical Absorber.

Analysis and Design of Refractive Index Biosensors Based on Single Silicon Nanobeam Cavity

Analysis of Electrooptic Modulator With 1-D Slotted Photonic Crystal Nanobeam Cavity

Flexible Silicon Dimer Nanocavity with Electric and Magnetic Enhancement

Optical Properties of Ultrathin Biohybrid Membranes: Implications for Optoelectronic Applications

Nanocavity Absorption Enhancement for Two-Dimensional Material Monolayer Systems

Transferable single-layer GeSn nanomembrane resonant-cavity-enhanced photodetectors for 2 μm band optical communication and multi-spectral short-wave infrared sensing

Optical Absorbers: Nanocavity Enhancement for Ultra‐Thin Film Optical Absorber (adv. Mater. 17/2014)

Schottky Barrier Modulation in Surface Nanoroughened Silicon Nanomembranes for High-Performance Optoelectronics.

Comparison of Optical Absorption in Si Nanowire and Nanoporous Si Structures for Photovoltaic Applications

Tunable Nanosensor With a Horizontal Number Eight-Shape Cavity in a MIM Waveguide System

Optically Manipulated Nanomechanics of Semiconductor Nanowires*

Integrated micro-and nano optical cavities on a chip for supersensitive sensing

Simulations of Enhance Broadband Optical Absorption by Tuning Mie Resonance in Silicon Nanocone Arrays

Broadband Optical Absorption by Tunable Mie Resonances in Silicon Nanocone Arrays