Fault Detection for Batch Processes Based on Gaussian Mixture Model

Jing WANG,Yi HU,Hong-Bo SHI
DOI: https://doi.org/10.16383/j.aas.2015.c130680
2015-01-01
Abstract:A new novel of principal component analysis-multiple Gaussian mixture model (PCA-MGMM) method is proposed in this article to handle the problem about outliers and noise interference, which affects the accuracy of modeling when dividing multiple operation phases in batch processes. At first, a shortest length approach is used to solve the problem of unequal data, while a method of hybrid unfolding of a multi-way data matrix is used to eliminate data estimate problem. Secondly, using PCA sequentially to achieve a low-dimensional representation of the original data space, the operation not only gets the principal but also eliminates the outliers and noise interference. After that the modified algorithm of Gaussian mixture model (GMM) is adopted to automatically optimize the number of Gaussian components and estimate their statistical distribution parameters so as to reduce the computational complexity. Finally, the online monitoring is guaranteed to be continuous by using a global probability index integrated by local probability indices of each operation. The effectiveness and flexibility of the proposed method is validated through an empirical study on a real semiconductor process.
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