Online fault monitoring for batch processes based on adaptive multi-model ICA-SVDD

Wang Peiliang,Zhiqiang Ge,Zhihuan Song
2009-01-01
Abstract:Traditional batch process monitoring method MPCA is under the assumption that the process data are Gaussian distributed.Meanwhile,it needs to estimate the future value of the monitored batch.To some extents, these two drawbacks may limit the application of the MPCA method.Therefore,a sequence of adaptive multi-models is built,which avoids future value estimation of traditional method.Besides,it also considers the correlated information between time slices of the batch process.ICA is used to extract the non-Gaussian information from the batch process data,which is followed by the incorporation of SVDD to model the extracted independent components.Then a new statistic is constructed for batch process online fault monitoring.The experimental case study on a real semiconductor process shows that the proposed method can effectively deal with the batch process data information.
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