Inclinometer Based on Optical Microfiber Probes

Junjie Wang,Shijie Tan,Wei Zhang,Yanpeng Li,Qizhen Sun,Deming Liu

DOI: https://doi.org/10.1364/cleo_at.2019.jw2a.100

2019-01-01

Abstract:An inclinometer based on optical microfiber probes is proposed and experimentally demonstrated, which is capable of measuring the tilt angle and direction simultaneously with a resolution lower than 0.0004° within ± 5°.

What problem does this paper attempt to address?

A New Method to Eliminate the Misalignment Angle in Dynamic Goniometer Based on Fiber Optic Gyro

Jiapeng Mou,Bin Pang,Tengchao Huang,Guangyao Ying,Xiaowu Shu

DOI: https://doi.org/10.1016/j.ijleo.2019.162998

IF: 3.1

2019-01-01

Optik

Abstract:A new development in the dynamic angle measurement based on fiber optic gyro is described, in which a tilt sensor using for accurate measurement of the inclination angle is added to the dynamic goniometer, aiming to eliminating the misalignment angle and improving precision. The principle of the method to eliminate the misalignment angle is introduced in detail. A series of experiments have been carried out to verify this method. Experimental results show the measurement error of the goniometer is better than 2″ and the standard deviation is nearly 0.2″ by this method. It indicates that the method is effective for reducing the misalignment angle and improving the precision of the dynamic goniometer.
Optical Tilt Sensor with Direct Intensity-Modulated Scheme

Shuangshuang Zhao,Juan Zhang,Changlun Hou,Jian Bai,Guoguang Yang

DOI: https://doi.org/10.1117/1.3655566

IF: 1.3

2011-01-01

Optical Engineering

Abstract:An optical tilt sensor based on a phase-sensitive diffraction grating with direct intensity-modulated scheme is proposed in this paper. The tilt sensor consists of a coherent light source, an integrated grating, a mechanical sensing part, and an optical signal processing circuit. The mechanical sensing part consists of a bulk proof mass and two cantilevers that can be fabricated with a two-mask process on a silicon-on-insulator substrate. A phase-sensitive diffraction grating, which was formed with the integrated grating and the upper surface of the proof mass, acts as the sensing element for the tilt measurement. Experimental results show this tilt sensor provides the optimal tilt sensitivity of 1.15 V/° and resolution of about 0.0046°, and a measurement range of ±20° in a rotational plane that is perpendicular to the direction of the earth's gravity.
A High-Resolution Dynamic Fiber-Optic Inclinometer

Yang,Xiaobo Ma,Ke Chen,Enyu Wang,Zhihao Yu,Qingxu Yu

DOI: https://doi.org/10.1016/j.sna.2018.10.007

IF: 4.291

2018-01-01

Sensors and Actuators A Physical

Abstract:We proposed a high-resolution dynamic fiber-optic inclinometer based on a Fabry-Perot (F-P) interferometer and a vertical cantilever structure with an inertial mass. The F-P cavity length variation approximates the vertical cantilever deflection corresponding to the tilt angle. As a fast demodulation mechanism is applied, the F-P cavity length is absolutely and dynamically measured. The tilt angle is obtained by extracting direct current component from the real-time signals of the F-P cavity length. An experiment is carried out by using an adjustable micro-tilt platform mounted on a vibration table. The experimental results show a high tilt resolution of 0.03 '' within the measurement range of +/- 1 degrees. The dynamic resolution of the tilt measurement in ambient vibration is also estimated to 0.66 '' with the simulated vibration frequency and amplitude of 50 Hz and 20.9 mu m. Due to the dynamic measurement method, the tilt angle readouts are tolerant of ambient vibration. (C) 2018 Elsevier B.V. All rights reserved.
A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions

Yuki Shimizu,Satoshi Kataoka,Tatsuya Ishikawa,Yuan-Liu Chen,Xiuguo Chen,Hiraku Matsukuma,Wei Gao

DOI: https://doi.org/10.3390/s18020398

IF: 3.9

2018-01-01

Sensors

Abstract:In this paper a new concept of a liquid-surface-based three-axis inclination sensor for evaluation of angular error motion of a precision linear slide, which is often used in the field of precision engineering such as ultra-precision machine tools, coordinate measuring machines (CMMs) and so on, is proposed. In the liquid-surface-based three-axis inclination sensor, a reference float mounting a line scale grating having periodic line grating structures is made to float over a liquid surface, while its three-axis angular motion is measured by using an optical sensor head based on the three-axis laser autocollimation capable of measuring three-axis angular motion of the scale grating. As the first step of research, in this paper, theoretical analysis on the angular motion of the reference float about each axis has been carried out based on simplified kinematic models to evaluate the possibility of realizing the proposed concept of a three-axis inclination sensor. In addition, based on the theoretical analyses results, a prototype three-axis inclination sensor has been designed and developed. Through some basic experiments with the prototype, the possibility of simultaneous three-axis inclination measurement by the proposed concept has been verified.
A Dual-Axis Optoelectronic Inclinometer Based on Wavefront Interference Fringes

Pengcheng Hu,Xionglei Lin,Yifan Zhang,Liang Yu

DOI: https://doi.org/10.1109/TIM.2023.3272378

IF: 5.6

2023-01-01

IEEE Transactions on Instrumentation and Measurement

Abstract:With the rapid development of ultraprecision instruments, inclinometers play an essential role in machining and calibration. The current mainstream methods based on capacitance, inductance, or optoelectronic autocollimators can achieve a high resolution but they are not directly traceable. In addition, their systems are relatively complex and large. In this study, a novel dual-axis optoelectronic inclinometer is proposed, the tilt angle can be precisely measured by calculating the spatial frequency of wavefront interference fringes, and the liquid surface is applied as its reference. Compared with other interferometers and autocollimators, the proposed inclinometer is not sensitive to mechanical errors and the air refractive index. Therefore, the measurement result is directly traceable to gravity and the laser wavelength. A compact prototype was fabricated to verify the effectiveness of the proposed method. Our experimental results show that the prototype achieves a low long-term drift of 0.02 arcsec/h and a resolution of greater than 0.1 arcsec, with high sensitivity and stability. Compared with a commercial autocollimator, the linear error of the prototype was less than 0.16%.
A Real-Time Inclinometer Based On An Etched Fiber Bragg Grating Connected To Hollow-Core Fiber

qiang zhang,tao zhu,fengyang yin,kin seng chiang,ming deng

DOI: https://doi.org/10.1117/12.2059071

2014-01-01

Abstract:We propose and experimentally demonstrate a low-cost, compact temperature-insensitive inclinometer, which is constructed by connecting a chemically etched fiber Bragg grating to a hollow-core fiber filled with tin. The optical power reflected from the grating is linearly proportional to the inclination angle of the grating and can provide a real-time measure of the inclination angle. Our experimental sensor can measure the inclination angle from 0 degrees to 20 degrees with an uncertainty of +/- 0.35 degrees and negligible temperature interference.
Optical Inclinometer Based on a Single Long-Period Fiber Grating Combined with a Large Lateral Offset

Deng Ming,Yin Feng-Yang,Shi Lei-Lei,Zhu Tao

DOI: https://doi.org/10.1117/12.2199788

2015-01-01

Abstract:Tilt sensor is becoming more and more popular in many engineering fields. With the development of the sensor, tilt sensor with high sensitivity and directional is required in these fields. A simple, compact and high sensitivity fiber-optic directional tilt angle sensor is proposed and experimentally demonstrated in this paper. This novel structure is based on an asymmetrical in-line M-Z inclinometer, as a result, the structure is very compact. At the same time, the structure is easy to fabricate. Because of the asymmetrical structure, different changes happened to the sensor and the sensor can recognize the tilt direction. The tilt angle is obtained by monitoring the resonant wavelength shift and the tilt direction can be obtained from the redshift or blueshift. This structure got a very high sensitivity of 0.935nm/° in a range from -3° to 3°.
Push–pull Fiber Optic Inclinometer Based on a Mach–Zehnder Optical Low-Coherence Reflectometor

LB Yuan

DOI: https://doi.org/10.1063/1.1753107

IF: 1.6

2004-01-01

Review of Scientific Instruments

Abstract:A push–pull inclinometer based on the gravity-referenced rotation fiber optic sensing system is demonstrated by using a specially designed parallelogram pendulum. It measures the angle variations between a nominally vertical reference line in the civil structure and the direction of gravity. By using a low-coherence fiber optic Mach–Zehnder interferometric technique, rotation sensitivity in the two perpendicular vertical planes of 0.2′ can be achieved. The total measurement range is ±5° and the temperature cross-sensitivity is expected to be very low. These values compare favorably to the high-end of electronic inclinometers and are well suited for the monitoring of civil structures such as bridges, towers, and anchored walls. The small size of the sensors and the mechanical design make them suitable for open-air use, while the low temperature sensitivity makes them ideal for eliminating temperature-induced rotations. The proposed inclinometer has a resolution of 0.2′ and a precision of 1′ full scale.
A Fiber Inclinometer Using a Fiber Microtaper with an Air-Gap Microcavity Fiber Interferometer

Zhongyao Feng,Tingting Gang,Manli Hu,Xueguang Qiao,Nan Liu,Qiangzhou Rong

DOI: https://doi.org/10.1016/j.optcom.2015.11.047

IF: 2.4

2016-01-01

Optics Communications

Abstract:A micro-inclinometer is proposed and demonstrated experimentally; the device consists of a micro-fiber taper followed by an air-gap microcavity. A part of the core mode can couple to cladding modes via the taper. These cladding modes and residual core modes transmitted to downstream of the Fabry–Perot (FP) interferometer. A fraction of these modes are reflected back to the SMF by two surfaces of the FP cavity and eventually recoupled to the leading-in SMF, resulting in a well-defined interference spectrum. The fringe contrast of the interferometer is highly sensitive to fiber bending with direction-independence and thus is capable of measuring tilt angles in high resolution. In addition, the interference wavelength always remains unchanged during the fiber bending.
Two-Channel Inclinometer Based On Low-Coherence Fiber-Optic Mach-Zehnder Interrogation Technique

Lb Yuan,Sk Ma

DOI: https://doi.org/10.1109/icsens.2003.1278924

2003-01-01

Abstract:A two-channel inclinometer based on the gravity-referenced rotation fiber optic sensing system is demonstrated. It measures the angle variations between a nominally vertical reference line in the civil structure and the direction of gravity. By using low-coherence fiber optic Mach-Zehnder interferometric technique, the rotations sensitivity in the two perpendicular vertical planes can be achieved in the 0.2' with the dynamics range of +/-5degrees.
Highly sensitive fiber-optic inclinometer utilizing a polymer waveguide-embedded interferometric sensor

Chuanyang Huang,HongDong Chen,cheng caner,Li songwei,Zhang qiunan,Yongmei Wang,Zhang zhao,Laipeng Shao,Jian tang,Tao weiju,Kuikui Guo,Junhui Hu,Lu HangLin

DOI: https://doi.org/10.1364/oe.537226

IF: 3.8

2024-09-11

Optics Express

Abstract:Chuanyang Huang, Hongdong Chen, Caner Cheng, Songwei Li, Qiunan Zhang, Yongmei Wang, Zhao Zhang, Laipeng Shao, Jian Tang, Weiju Tao, Kuikui Guo, Junhui Hu, Hanglin Lu A highly sensitive fiber-optic inclination sensor using a modal interferometer was proposed in the present study, which has a photopolymer ... [Opt. Express 32, 34431-34443 (2024)]

optics
Temperature-Insensitive Real-Time Inclinometer Based on an Etched Fiber Bragg Grating

qiang zhang,tao zhu,fengyang yin,kin seng chiang

DOI: https://doi.org/10.1109/LPT.2014.2313334

IF: 2.6

2014-01-01

IEEE Photonics Technology Letters

Abstract:We propose and experimentally demonstrate a compact temperature-insensitive inclinometer, which is constructed by connecting a chemically etched fiber Bragg grating to a hollow-core fiber filled with tin. The optical power reflected from the grating is linearly proportional to the inclination angle of the grating and can provide a real-time measure of the inclination angle. Our experimental sensor...
Bending Sensor Based on a Compact Microfiber Probe.

Shijie Tan,Yanpeng Li,Jingyi Wang,Zhijun Yan,Deming Liu,Qizhen Sun

DOI: https://doi.org/10.23919/ps.2019.8817704

2019-01-01

Abstract:A miniature bending sensor based on a microfiber probe is proposed and demonstrated. By monitoring the intensity of reflection spectrum, a curvature sensitivity of 1.1 06dBlm -1 and a large measurement range o.f 0-11.825m -1 are demonstrated.
A compact 2D micro-angle sensor

Mengdong Lian,Bingfeng Ju

2010-01-01

Abstract:This paper presents a compact two-dimensional micro-angle sensor for measuring surface profiles and motions. The sensor based on the principle of laser autocollimation, consists of a laser diode as a light source and a quadrant photodiode as a position-sensing device. The laser beam is collimated to a thin parallel beam which makes it possible to detect small variation of the target mirror mounted on the precision stage. The sensitivity of the angle sensor does not rely on the focal length of the objective lens, which makes it probable to realize the compact volume. The quadrant photodiode has two-dimensional position-detecting capability, therefore, the angle sensor can detect two-axis tilt simultaneously. The micro-angle sensor has a dimension of 25×20×13mm. The detection range is ±1200 arc-seconds and the resolution is 0.1 arc-second. Comparison experiments with an autocollimator are carried out, which testify the validity of the new compact 2D micro-angle sensor.
Ultrasensitive tilt angle measurement using a photonic frequency inclinometer

Zichao Huang,Congzhen Chen,Ling Hong,Yuanyuan Chen,Lixiang Chen

DOI: https://doi.org/10.1364/OE.482578

2023-04-24

Abstract:Quantum metrology promises a great enhancement in measurement precision that beyond the possibilities of classical physics. We demonstrate a Hong-Ou-Mandel sensor that acts as a photonic frequency inclinometer for ultrasensitive tilt angle measurement within a wide range of tasks, ranging from the determination of mechanical tilt angles, the tracking of rotation/tilt dynamics of light-sensitive biological and chemical materials, or in enhancing the performance of optical gyroscope. The estimation theory shows that both a wider single-photon frequency bandwidth and a larger difference frequency of color-entangled states can increase its achievable resolution and sensitivity. Building on the Fisher information analysis, the photonic frequency inclinometer can adaptively determine the optimum sensing point even in the presence of experimental nonidealities.
Direction-independent Fiber Inclinometer Based on Simplified Hollow Core Photonic Crystal Fiber.

Shuhui Liu,Ningliang Liu,Maoxiang Hou,Jiangtao Guo,Zhihua Li,Peixiang Lu

DOI: https://doi.org/10.1364/ol.38.000449

IF: 3.6

2013-01-01

Optics Letters

Abstract:A fiber optical inclinometer based on modal interferometer is demonstrated for bend angle sensing. The device consists of a piece of simplified hollow core photonic crystal fiber sandwiched between single mode fibers with lateral offset. The measurement of bend angles up to 45° is demonstrated, and the spectrum exhibits a blueshift of over 50 nm. The sensitivity is found to increase with the applied bend angles and reaches 2.4 nm/deg at 45°, and the response is independent of the direction of bending. A low temperature sensitivity of 0.5 pm/°C is observed between room temperature and 1000°C. Due to its capacity for withstanding high temperature, the device can work as a direction-independent inclinometer in high-temperature environments.
Novel method for two-coordinate slope test with fiber optic sensor

Yong Zhao,Pengsheng Li,Zhaobang Pu,Zhengnai Sun

DOI: https://doi.org/10.1117/12.401714

2000-01-01

Abstract:The demand for incorporating sensor technology into the production environment is being driven by the increasing need to minimize manufacturing costs whilst simultaneously producing parts of high quality. A novel simple fiber-optic sensor based on the light beam reflection principle was presented for slopes measurement. With the optical probe arrangement like a wheel, the emitting single-mode finer (SMF) as the axle and eight receiving multi-mode fibers (MMF) as the spoke, the sensor can detect the surface slopes with two- coordinate as well as the offsets of displacement measurement can be compensated. The mathematical models were established based on the ABCD Law of Gaussian beam transmission matrix optics and in the case of paraxial approximation. Simulations were performed for verifying the proposed idea, and the preliminary experimental results were obtained and its performance coincided with the simulation. The resolution of slopes test was better than 0.02 degree over +/- 30 degree, and the displacement measurement vertical resolution stayed within 0.1 micron, the lateral resolution can reach 8 micron. And with the further development of this method, it can be absolutely used in complex surface measurement in Reverse Engineering.
Experimental Research on A Novel Fiber-Optic Cantilever-Type Inclinometer

Y Zhao,J Yang,BJ Peng,SY Yang

DOI: https://doi.org/10.1016/j.optlastec.2004.08.006

2005-01-01

Abstract:Experimental setup for tilt measurement and a novel signal detection method for demodulation of fiber Bragg grating (FBG) wavelength shift are proposed. Being attached, respectively, on the upper and lower surface of only one single pendulum-type cantilever element, only a couple of matched FBGs are used for both tilt angle sensing and wavelength shift signal demodulating. So the received light power will change due to the split of the two reflected spectra of FBGs, which corresponds to the tilt angle. In addition, the cross-sensitivity effect of FBG-based sensors will be solved automatically due to a differential signal process method. Experimental results indicate the measurement accuracy is about ± 0.03°, and measurement resolution is estimated to be about 0.002°.
Microfiber-probe-based Ultrasmall Interferometric Sensor.

Jun-long Kou,Jing Feng,Qian-jin Wang,Fei Xu,Yan-qing Lu

DOI: https://doi.org/10.1364/ol.35.002308

IF: 3.6

2010-01-01

Optics Letters

Abstract:We report an ultrasmall microfiber-probe-based reflective interferometer for highly sensitive liquid refractive index measurement. It has a 3.5 microm micronotch cavity fabricated by focused ion beam micromachining. A sensitivity of 110 nm/RIU (refractive index unit) in liquid is achieved with over 20 dB extinction ratio. Theoretical analysis shows this kind of device is a hybrid of Fabry-Perot and modal interferometers. In comparison with normal fiber interferometers, this probe sensor is very compact, stable, and cheap, offering great potentials for detecting inside sub-wavelength bubbles, droplets, or biocells.
Differential fiber-optic micro-angle sensor

Yijun Liang,Yande Xu,Xiaoyan Lin,Libo Yuan

1998-01-01

Abstract:A differential fiber-optic micro-angle sensor has been designed using twin face reflective modulating technique. Its range of dynamic is ±10′, resolution power is 1″. Its precision has achieved 3″. It can be used in different kind micro-angle non-contact measurement.

Inclinometer Based on Optical Microfiber Probes

A New Method to Eliminate the Misalignment Angle in Dynamic Goniometer Based on Fiber Optic Gyro

Optical Tilt Sensor with Direct Intensity-Modulated Scheme

A High-Resolution Dynamic Fiber-Optic Inclinometer

A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions

A Dual-Axis Optoelectronic Inclinometer Based on Wavefront Interference Fringes

A Real-Time Inclinometer Based On An Etched Fiber Bragg Grating Connected To Hollow-Core Fiber

Optical Inclinometer Based on a Single Long-Period Fiber Grating Combined with a Large Lateral Offset

Push–pull Fiber Optic Inclinometer Based on a Mach–Zehnder Optical Low-Coherence Reflectometor

A Fiber Inclinometer Using a Fiber Microtaper with an Air-Gap Microcavity Fiber Interferometer

Two-Channel Inclinometer Based On Low-Coherence Fiber-Optic Mach-Zehnder Interrogation Technique

Highly sensitive fiber-optic inclinometer utilizing a polymer waveguide-embedded interferometric sensor

Temperature-Insensitive Real-Time Inclinometer Based on an Etched Fiber Bragg Grating

Bending Sensor Based on a Compact Microfiber Probe.

A compact 2D micro-angle sensor

Ultrasensitive tilt angle measurement using a photonic frequency inclinometer

Direction-independent Fiber Inclinometer Based on Simplified Hollow Core Photonic Crystal Fiber.

Novel method for two-coordinate slope test with fiber optic sensor

Experimental Research on A Novel Fiber-Optic Cantilever-Type Inclinometer

Microfiber-probe-based Ultrasmall Interferometric Sensor.

Differential fiber-optic micro-angle sensor