Abstract:Molecules exhibit their unique light absorption spectra due to molecular vibration in the mid-infrared region (3–15 μm), and thus, a method to control mid-infrared light is important for various sensing applications including nondispersive infrared absorption (NDIR) sensing. In this study, we demonstrate an electrically controllable mid-infrared bandpass filter that can serve as both a chopper for synchronous detection to improve detection sensitivity and a wavelength-selective filter in NDIR systems. The proposed filter consists of a photonic crystal (PC) slab with multiple quantum wells (MQWs), where the frequency of the intersubband transition in MQWs coincides with those of a transverse-magnetic-like (TM-like) resonance and a transverse-electric-like (TE-like) resonance simultaneously. As a result, this design shows a narrowband bandpass transmission spectrum in the mid-infrared region for vertically incident light owing to the interference of the two resonances. In addition, the magnitude of the peak transmittance can be electrically modulated by changing the electron density in the MQW and modulating the absorption coefficient of intersubband absorption (ISB-T). By fabricating the designed filter, we demonstrate a narrow-bandwidth (Q ∼ 70) transmission spectrum with a transmittance change of 20% and a modulation speed of over 100 kHz at a wavenumber of 1030 cm–1. Moreover, we develop a nonmechanical NDIR system using the proposed filter and successfully demonstrate a detection of fast gas-flow change of C3F8.

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Non-polarized and Ultra-Narrow Band Filter in MIR Based on Multilayer Metasurface

Suspended Microracetrack Resonator with Lateral Sub-wavelength-Grating Metamaterial Cladding for Mid-infrared Sensing Applications

Multi-narrowband absorber based on subwavelength grating structure

A triple-mode ring dielectric resonator band-pass filter using substrate integrated waveguide (SIW)

Enhancing Coupling Resonance in Multilayer MIM Structure and F-P Cavity Mode for Mid-Infrared Band Applications

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Wide spectral range guided-mode resonant grating designed for the wet etching process

Mid-Infrared Sensor Based on a Suspended Microracetrack Resonator With Lateral Subwavelength-Grating Metamaterial Cladding

Germanium-On-Silicon Nitride Waveguides for Mid-Infrared Integrated Photonics

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Design of Sub wavelength-Grating-Coupled Fano Resonance Sensor in Mid-infrared

Broadband and High-Enhancement-factor Integrated Long-Wave Infrared Sensor Using the Photonic Crystal Assisted Subwavelength Grating Waveguide

Development of Electrically Controllable Mid-Infrared Bandpass Filters for Mechanical-Chopper-Free NDIR Sensing

Multiple Fano resonances by MIM waveguide coupling whispering gallery mode resonator and application in Refractive index sensing