Abstract:Carbon dioxide ( <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> ) is a gas vital for life on Earth. It is also a waste product of human activities and is widely used in agriculture and industry. Its accurate sensing is therefore of great interest. Optical sensors exploiting the mid-infrared light absorption of <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> provide high selectivity, but their large size and high cost limit their use. In this Letter, we demonstrate <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> gas sensing at 4.2 µm wavelength using an integrated silicon waveguide, featuring a sensitivity to <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> of 44% that of free-space sensing. The suspended waveguide is fabricated on a silicon-on-insulator substrate by a single-lithography-step process, and we route it into a mid-infrared photonic circuit for on-chip-referenced gas measurements. Its demonstrated performance and its simple and scalable fabrication make our waveguide ideal for integration in miniaturized <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> sensors for distributed environmental monitoring, personal safety, and medical and high-volume consumer applications.

Photon counting carbon dioxide gas sensing at 2.05μm wavelength

Ultra-broadband Microfiber-Coupled Superconducting Single-Photon Detector

Microfiber-coupled superconducting nanowire single-photon detector for near-infrared wavelengths.

Supercontinuum Single-Photon Detector Using Multilayer Superconducting Nanowires

Low-noise single-photon counting superconducting nanowire detectors at infrared wavelengths up to 29 $μ$m

Superconducting Nanowire Single-photon Detectors at a Wavelength of 2000 Nm

Single-photon detection using high-temperature superconductors

High-Speed Carbon Nanotube Photodetectors for 2 Μm Communications.

Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide

High-Speed Carbon Nanotube Photodetectors for 2 μm Communications

Mid-infrared single photon detector with superconductor Mo$_{80}$Si$_{20}$ nanowire

Mid-infrared Single Photon Detector with Superconductor Mo$_{80}$Si$_{20}$ Nanowire

Mid-infrared Single Photon Detector with Superconductor Mo0.8Si0.2 Nanowire

Carbon-dioxide absorption spectroscopy with solar photon counting and integrated lithium niobate micro-ring resonator

Dual-Mode Calorimetric Superconducting Nanowire Single Photon Detectors

Photonic Readout of Superconducting Nanowire Single Photon Counting Detectors

Superconducting nanowire single-photon detectors: physics and applications

Silicon Waveguide Sensors for Carbon Dioxide Gas Sensing in the Mid-Infrared Region

Photon-Counting Spectrometers Based on Superconducting Nanowire Single-Photon Detectors

Mid-infrared Quasi-Distributed Carbon Monoxide Gas Sensing Based on QEPAS and Hollow Waveguide

Experimental Demonstration of Superconducting Series Nanowire Photon-Number-Resolving Detector at 660 Nm Wavelength