Improved Internal Quantum Efficiency of Photoluminescence in Zinc Ion-Implanted ZnO Bulk Crystals

He Haiping,Li Shuoxing,Ye Zhizhen
DOI: https://doi.org/10.1007/s00339-019-2520-1
2019-01-01
Abstract:Achieving a high internal quantum efficiency (IQE) of luminescence is critical to the optoelectronic applications but still a challenge for ZnO materials. In this work, we demonstrate that the IQE of bulk ZnO crystals can be greatly increased by Zn+ ion implantation and subsequent annealing. The implantation dose, energy, and annealing temperature are found to affect the IQE significantly. A highest IQE of 30.8% can be achieved when the ZnO crystal is implanted with dose of 1 × 1015cm−2 and rapidly annealed at 700 °C. The improving of IQE is interpreted as a combination result of suppressed formation of vacancy defects and enhanced exciton–phonon coupling.
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