Abstract:The recent advancement of flexible pressure sensors leads to promising applications in electronic skins for human-machine interaction and bionic device for intelligent wearable field. The abilities of such sensors to possess zero power consumption in standby mode, high sensitivity and wide linear response range are critical yet highly desirable in real flexible-matrix-based scenes. Despite the myriad of the existing approaches, it is still challenging to fulfill these requirements simultaneously in a single pressure sensor. Herein, we demonstrate a high-performance, zero-standby-power-consumption flexible pressure sensor by introducing a tunable photoresist spacer (PS) sandwiched between the top truncated-pyramid microstructure polydimethylsiloxane (PDMS)/aluminum-doped zinc oxide (AZO) and the bottom polyimide (PI)/gold (Au) interdigital electrode (PDMS-AZO/PS/PI-Au). The fabricated pressure sensor is equipped with bending-insensitive and zero-power-consumption merit under the bending angle of less than 20.5 degrees benefiting from the insulation effect of PS. As a result, the fabricated sensor exhibits ultrahigh sensitivity of 2200 kPa(-1) in the ultrawide linear response range of 62 Pa-9.6 kPa and fast response and recovery time (<20 ms). Moreover, according to the finite element modeling (FEM), the introduction of the top and bottom microstructures is proven to offer multiple contacting stages (e.g. point contacting, point saturation and surface saturation) and further enlarged contacting area, resulting in ultrahigh sensitivity and wide linear response range, which are strongly supported by experimental results. As a proof of concept, an artificial somatic reflex arc is successfully integrated into a volunteer to tune the LED-lit brightness and quantities. We believe that our high-performance pressure sensor holds great potential for the applications in a broad range of actual flexible-matrix-based scenes.

Achieving High-Resolution Pressure Mapping Via Flexible GaN/ ZnO Nanowire LEDs Array by Piezo-Phototronic Effect

High-resolution Electroluminescent Imaging of Pressure Distribution Using a Piezoelectric Nanowire LED Array

A Flexible Crosstalk-Free Piezoresistive Pressure Sensor Array Based on Interdigital-Electrode for High-Precision Pressure Mapping

Progress in Piezo-Phototronic-Effect-Enhanced Light-Emitting Diodes and Pressure Imaging

High-Resolution Dynamic Pressure Sensor Array Based on Piezo-phototronic Effect Tuned Photoluminescence Imaging

High-Resolution Spatial Mapping of Pressure Distribution by a Flexible and Piezotronics Transistor Array

Highly Sensitive and Wide Linear-Response Pressure Sensors Featuring Zero Standby Power Consumption under Bending Conditions

Junction Piezotronic Transistor Arrays Based on Patterned ZnO Nanowires for High-Resolution Tactile and Photo Mapping

A high-resolution flexible sensor array based on PZT nanofibers

High-performance Zero-Standby-power-consumption-under-bending Pressure Sensors for Artificial Reflex Arc

Advancing pressure sensors performance through a flexible MXene embedded interlocking structure in a microlens array

Flexible Light Emission Diode Arrays Made Of Transferred Si Microwires-Zno Nanofilm With Piezo-Phototronic Effect Enhanced Lighting

High-performance Flexible Piezoresistive Pressure Sensor Based on Multi-layer Interlocking Microstructures

A Flexible Pressure Sensor Based on Silicon Nanomembrane

High‐Performance Flexible Pressure Sensor Based on Controllable Hierarchical Microstructures by Laser Scribing for Wearable Electronics

Microstructured Liquid Metal‐Based Embedded‐Type Sensor Array for Curved Pressure Mapping

A Flexible Piezocapacitive Pressure Sensor with Microsphere-Array Electrodes

Flexible and Highly Sensitive Pressure Sensors Based on Microstructured Carbon Nanowalls Electrodes

High-Resolution and High-Sensitivity Flexible Capacitive Pressure Sensors Enhanced by a Transferable Electrode Array and a Micropillar–PVDF Film

Flexible Piezoresistive Sensor with the Microarray Structure Based on Self-Assembly of Multi-Walled Carbon Nanotubes

A graphene flexible pressure sensor based on a fabric-like groove structure for high-resolution tactile imaging