Temporary Bonding Using Paper Inserted PPC Layer

Zhiyuan Zhu,Kequan Xia,Zhiwei Xu,Hongze Zhang,Haijun Lou
DOI: https://doi.org/10.33180/infmidem2018.403
2018-01-01
Informacije MIDEM - Journal of Microelectronics Electronic Components and Materials
Abstract:Temporary bonding using paper inserted polypropylene carbonate (PPC) layer is demonstrated. The inserted paper layer can absorb photo acid generator (PAG)-induced acid and protect the substrate. Large improvements of bonding strength are achieved using paper inserted PPC layer. Especially, the bonding strength is much higher than that of PPC/PAG-PPC bonding for tissue paper. The results show that the paper fibers can absorb decomposed PPC and PAG induced acid, thus protecting the substrate.
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