Abstract:Love wave sensors have been widely used because of their high sensitivities.Meanwhile,they can be used for detecting harmful gases in gas environments and also some chemical or biological substances in liquid environments.Therefore,researches on Love wave sensors are attracting a great attention in recent years.In this paper,Love-mode immunosensors based on ZnO/36°YX-LiTaO3 structures are fabricated and the sensitivities of the immunosensors are studied.The sensitivity of Love wave sensors is affected by many factors,and the thickness of the guiding layers is a critical factor.Because the guiding layers can trap the acoustic energy to near surfaces of the Love wave sensors,the sensors display especially sensitive to surface perturbations.The experimental results show that when the thicknesses of the ZnO guiding layers are changed,the sensitivities of the immunosensors are also different;at the same time,there are optimum thicknesses of the ZnO guiding layers that make the sensitivities of the immunosensors to be the highest.Theoretical studies on Love wave devices based on ZnO/36°YX-LiTaO3 structures are carried out using partial wave theory of elastic waves propagation in thin films.Then the relationships between the normalized thickness of the guiding layer and sensitivities of the Love devices are studied.The numerical results demonstrate that when the normalized thickness of the guiding layer is in the range 0～0.10,the phase velocities of the Love devices decrease with increasing the thicknesses of the guiding layers with surface free and also mass loading.Meanwhile,the sensitivities increase firstly with increasing layer thicknesses,then decrease with the layer thicknesses further increase,i.e.,there are optimum thicknesses for getting the maximum sensitivities,which are in agreement with the experimental results roughly.

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