Optimiztion of Novel Interdigitated Electrode Structure for Capacitive Humidity Sensing

Hong Liu,Jia Zhou
DOI: https://doi.org/10.1109/icsict.2018.8565714
2018-01-01
Abstract:Recently, humidity sensors have been investigated extensively due to its broad application in chip fabrication, health care, agriculture, and so on. We proposed a new structure with a shielding electrode under the interdigitated electrode (SIDE). The shielding electrode makes the humidity sensors possess the advantages of high sensitivity of sensors of parallel plate capacitors and the fast response of interdigitated electrode capacitors. The sensitivity of SIDE is 0.0063/% RH, and the response/recovery time is 20s/22s. We use COMSOL Multiphysics to verify the device with SIDE. The experimental data shows a very good agreement with the simulation. An optimized parameter of the structure is designed by the SIDE.
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