Non-filamentary Pd/Al<inf>2</inf>O<inf>3</inf>/TaO<inf>x</inf>/Ta Memristor as Artificial Synapse for Neuromorphic Computing

Rui Wang,Xumeng Zhang,Tuo Shi,Jinsong Wei,Hangbing Lv,Qi Liu,Ming Liu
DOI: https://doi.org/10.1109/ICSICT.2018.8565785
2018-01-01
Abstract:We report a fully CMOS compatible bilayer, forming-free and non-filamentary memristive device with excellent bidirectional analog switching behavior as artificial synapse for neuromorphic computing applications. The bilayer stack structure, consisting of 8 nm TaO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> formed via oxidation process on Ta bottom electrode and 7 nm Al <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> via atom layer deposition (ALD), is sandwiched between the Ta bottom electrode and Pd top electrode. The Pd/Al <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> /TaO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> /Ta device shows bidirectional analog resistive switching behaviors, and multilevel conductance states (>60) with satisfying retention time can be obtained. Long term plasticity, consisting of long-term potentiation (LTP) and long-term depression (LTD), have been demonstrated based our device. And a nearly linear conductance change behavior is obtained by optimizing the training scheme: adopting non-identical training pulses.A two-layer perceptron neural networkwas performed to estimate the synapse characteristics of our devices. More than 94% recognition accuracy of MNIST handwritten digit dataset are achieved. Based on these results, the device is a promising emulator for biology synapse, and has a great potential to be used in neuromorphic systems.
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