Numerical Studies on Sub-10 Nanometer Resolution Imaging in Electrostatic Force Microscopy

Honglei Xu,Liangbing Zhao,Xidong Ding,Guocong Lin,Dihu Chen
DOI: https://doi.org/10.1080/10584587.2017.1352411
2017-01-01
Integrated Ferroelectrics
Abstract:The lateral resolutions of electrostatic force microscopy (EFM) are systematically simulated using the boundary element method, considering a bimetallic sample with surface potential inhomogeneities as a special case. Two widely used modulation modes in EFM, namely, amplitude modulation (AM) for ambient EFM and frequency modulation (FM) for vacuum EFM, are compared for tip-sample separation ranging from sub-nanometer to 100nm, and for various geometries and diameter of the probe. Different from the conventional viewpoint, the simulation results obtained in this study suggest the feasibility of realizing sub-10nm lateral resolution in ambient AM-EFM using a small tip-sample separation in the order of 5nm. This is almost the same as that of FM-EFM under vacuum. Furthermore, the simulation results are consistent with the reported experimental results. On the basis of the results, the optimal experimental parameters necessary for realizing sub-10nm resolution imaging in ambient EFM are suggested.
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