Abstract:With the advancement of micro/nanotechnology, precise control of the interaction between light and matter at the micro/nanoscale is crucial for successful material processing and surface functionalization. Ultrafast lasers with ultra-short pulses have gained attention due to their high spatial resolution and low thermal damage, enabling extremely smooth and precise machining on various metal surfaces. At the same time, shorter pulse nanosecond lasers, which have a wider application range, strike a balance between achieving high-precision microfabrication and mitigating adverse thermal effects caused by millisecond lasers. By adjusting laser processing parameters, it is possible to create large-scale micro/nanostructures with complex shapes, delicate textures, and special functionalities, applicable in fields such as optics, electronics, and biomedicine. Short/ultrafast pulse laser fabrication technology opens up more possibilities and prospects for the realization of diverse functional micro/nanostructures. This comprehensive review provides an overview of the interaction mechanisms between short/ultra-short-pulse laser micro/nanoprocessing and materials. By integrating theoretical models such as the two-temperature model and the Drude–Lorentz model, along with comprehensive numerical simulation methods, a brief summary of the ablation behavior of metal surfaces under short/ultra-short-pulse lasers is provided. Furthermore, we delve into the controllability of microstructures, laser-induced periodic surface structures at the nanoscale, and other types of nanostructures under different processing conditions. Thorough analysis and discussion are conducted from multiple perspectives, including surface topography and functional impacts. Subsequently, the focus shifts to the functionalization of metal surfaces with micro/nanostructures, and an in-depth investigation and review are conducted in areas such as surface wettability, bio-inspired surfaces, optical diffraction, and advanced biomedicine. Finally, the advantages and limitations of laser texturing processing techniques are discussed, and the future development of functionalized metal surfaces is anticipated.

Laser-assisted Processing and Diagnostics of Functional Micro/Nanomaterials☆

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Laser Synthesis and Microfabrication of Micro/Nanostructured Materials Toward Energy Conversion and Storage

Micro/nanoengineering of functionalized metal surfaces based on short/ultra-short-pulsed lasers: a review

Short-Pulse Lasers: A Versatile Tool in Creating Novel Nano-/Micro-Structures and Compositional Analysis for Healthcare and Wellbeing Challenges

Microscopic Processing of Transparent Material with Nanosecond and Ultrafast Lasers

Laser Processing of Emerging Nanomaterials for Optoelectronics and Photocatalysis

Advances in ultrafast laser structuring of materials at the nanoscale

The Fabrication of Micro/Nano Structures by Laser Machining

Laser nano-technology of light materials: Precision and opportunity

Femtosecond Laser Micro/nano Processing: From Fundamental to Applications

Editorial: Special Issue “Laser Synthesis and Processing of Nanostructured Materials”

Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

A review of ultrafast laser micro/nano fabrication: Material processing, surface/interface controlling, and devices fabrication

Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales

Creation of Material Functions by Nanostructuring

Preparation of functional nanomaterials with femtosecond laser ablation in solution

Laser Micro-Fabrication/Manipulation of Dielectric Materials

Recent advances in molecular dynamics of metal laser-processed nanoparticles: A review

Parallel Laser Micro/Nano‐Processing for Functional Device Fabrication

Advanced materials processing based on interaction of laser beam and a medium