Abstract:TiAlSiN multicomponent coating, owing to its high hardness and excellent high temperature resistance, was widely used in the cutting field of difficult-to-cut materials such as titanium alloys. For machining titanium alloys, high temperature is easy to gather on the tool chips and deteriorate the cutting tools. Moreover, high temperature will also promote the microstructure evolution and make the wear mechanism more complex. In this paper, TiAlSiN coatings were deposited on cemented carbides and annealed at 400 °C, 600 °C and 800 °C respectively for 60 min in air, followed by reciprocating friction tests against Ti6Al4V counterparts. AFM, SEM, EDS and XPS were applied to investigate the microstructure evolution and tribological behavior of TiAlSiN coating after high temperature annealing. The results demonstrated that the oxidation resistance of TiN phase in TiAlSiN coating was worse than Si3N4 and AlN phases. These nitrides can be oxidized to TiO2, SiOx and AlOx under 600 °C, and the depth of oxide layer was increased with the rising annealing temperature, resulting in the coarsened microstructure. The wear mechanisms of as-deposited TiAlSiN coating were oxidation wear and adhesion wear. With the rising annealing temperature, abrasive wear was gradually enhanced. For the TiAlSiN coating annealed at 800 °C, abrasive wear became the dominant wear mechanism.

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