Abstract:Recent trends of interferometric wavefront sensing tend to focus on high precision, anti-vibration, compact, along with much more involved of electric and computer technology. And the optical principles employed not only limit to interference but also include diffraction, scattering, polarization, etc. In this paper, some selected examples basing on the research works in our group will be given to illustrate the trends mentioned above. To achieve extra high accuracy, phase-shifting point diffraction interferometry (PS-PDI) is believed to be a good candidate as it employs a nearly perfect point diffraction spherical wavefront as the reference and also takes advantage of the high precision of phase-shifting algorithms. Cyclic radial shearing interferometry (C-RSI) successively demonstrate the anti-vibration characteristic and can diagnose transient wavefront with only one single shot by employing a three-mirror common-path configuration and a synchronizing system. In contrast sharply with those early interferometers, interferometers with very compact configuration are more suitable to develop portable wavefront sensing instruments. Cross-grating lateral shearing interferometer (CG-LSI) is a very compact interferometer that adopts a cross-grating of millimeters to produce lateral shearing of the diffraction wave of the test wavefront. Be aware that, computer technique has been used a lot in all of the above interferometers but the non-null annual sub-aperture stitching interferometer (NASSI) for general aspheric surface testing mostly relies on the computer model of the physical interferometer setup and iterative ray-tracing optimization. The principles of the above mentioned interferometric wavefront sensing methods would be given in detail.

Three-wave Radial Shearing Interferometer

Off-axis Cyclic Radial Shearing Interferometer for Measurement of Centrally Blocked Transient Wavefront.

Single-shot reflective shearing point diffraction interferometer for wavefront measurements.

Common-path and compact wavefront diagnosis system based on cross grating lateral shearing interferometer.

Multi-Directional Lateral Shearing Interferometer Based on Rotatable Prism Pairs

Radial Shearing Jamin Interferometer with Variable Carrier Frequency

System Optimization of Radial Shearing Interferometer for Aspheric Testing

Quadriwave Lateral Shearing Interferometer Based on a Randomly Encoded Hybrid Grating.

Single-Shot Two-Dimensional Surface Measurement Based On Spectrally Resolved White-Light Interferometry

Recent Developments of Interferometric Wavefront Sensing

Two-Dimensional Structural Surface Measurement Based On Spectrally Resolved White-Light Interferometry

Design of common path radial shearing interferometer

Non-null Testing of the Aspheric Surface Using a Quadriwave Lateral Shearing Interferometer

Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization

A New Lateral Shearing Interferometer for Precision Surface Measurement

Three-wave shearing interferometer based on spatial light modulator.

Development and Calibration of a Radial-Shearing Interferometer

Single and Double Shearing Interferometers Series for Laser Wave Front Testing

A Novel Wavefront Reconstruction Algorithm Based on Interpolation Coefficient Matrix for Radial Shearing Interferometry

Wave-front reconstruction technique of radial shearing interferometry based on least-squares

Wave-Front Reconstruction For Lateral Shearing Interferometers With Big Shear