Abstract:Recent trends of interferometric wavefront sensing tend to focus on high precision, anti-vibration, compact, along with much more involved of electric and computer technology. And the optical principles employed not only limit to interference but also include diffraction, scattering, polarization, etc. In this paper, some selected examples basing on the research works in our group will be given to illustrate the trends mentioned above. To achieve extra high accuracy, phase-shifting point diffraction interferometry (PS-PDI) is believed to be a good candidate as it employs a nearly perfect point diffraction spherical wavefront as the reference and also takes advantage of the high precision of phase-shifting algorithms. Cyclic radial shearing interferometry (C-RSI) successively demonstrate the anti-vibration characteristic and can diagnose transient wavefront with only one single shot by employing a three-mirror common-path configuration and a synchronizing system. In contrast sharply with those early interferometers, interferometers with very compact configuration are more suitable to develop portable wavefront sensing instruments. Cross-grating lateral shearing interferometer (CG-LSI) is a very compact interferometer that adopts a cross-grating of millimeters to produce lateral shearing of the diffraction wave of the test wavefront. Be aware that, computer technique has been used a lot in all of the above interferometers but the non-null annual sub-aperture stitching interferometer (NASSI) for general aspheric surface testing mostly relies on the computer model of the physical interferometer setup and iterative ray-tracing optimization. The principles of the above mentioned interferometric wavefront sensing methods would be given in detail.

Three-wave shearing interferometer based on spatial light modulator.

Multi-Directional Lateral Shearing Interferometer Based on Rotatable Prism Pairs

Isotropic three-dimensional imaging with lattice light-sheet difference microscopy.

Quadriwave Lateral Shearing Interferometer Based on a Randomly Encoded Hybrid Grating.

Single-shot reflective shearing point diffraction interferometer for wavefront measurements.

Radial Shearing Jamin Interferometer with Variable Carrier Frequency

Common-path and compact wavefront diagnosis system based on cross grating lateral shearing interferometer.

Four-step Spatial Phase-Shifting Shearing Interferometry from Moiré Configuration by Triple Gratings.

Research on Two Optical Methods for Aspheric Measurement

Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization

Generalized Phase-Shifting for Three-Wave Shearing Interferometry

The application of SLM in shearography detecting system

Wave-Front Reconstruction For Lateral Shearing Interferometers With Big Shear

Recent Developments of Interferometric Wavefront Sensing

Measuring Spatial Coherence by Using a Lateral Shearing Interferometry.

High-Precision Calibration of Phase-Only Spatial Light Modulators

Two-step phase-shifting interferometry for phase-resolved imaging from a spatial light modulator

High-Precision Correction for Spatial Light Modulator Based on Quadriwave Lateral Shearing Interferometry

Scanning Interferometric Method for Measuring Group Delay of Dispersive Mirrors

Complex Wavefront Sensing Based on Alternative Structured Phase Modulation.

Three-directional digital shearography based on SLM using a honeycomb-like pattern