Abstract:Periodically poled lithium niobate on insulator (PPLNOI) offers an admirably promising platform for the advancement of nonlinear photonic integrated circuits (PICs). In this context, domain inversion engineering emerges as a key process to achieve efficient nonlinear conversion. However, periodic poling processing of thin-film lithium niobate has only been realized on the chip level, which significantly limits its applications in large-scale nonlinear photonic systems that necessitate the integration of multiple nonlinear components on a single chip with uniform performances. Here, we demonstrate a wafer-scale periodic poling technique on a 4-inch LNOI wafer with high fidelity. The reversal lengths span from 0.5 to 10.17 mm, encompassing an area of ~1 cm2 with periods ranging from 4.38 to 5.51 μm. Efficient poling was achieved with a single manipulation, benefiting from the targeted grouped electrode pads and adaptable comb line widths in our experiment. As a result, domain inversion is ultimately implemented across the entire wafer with a 100% success rate and 98% high-quality rate on average, showcasing high throughput and stability, which is fundamentally scalable and highly cost-effective in contrast to traditional size-restricted chiplet-level poling. Our study holds significant promise to dramatically promote ultra-high performance to a broad spectrum of applications, including optical communications, photonic neural networks, and quantum photonics.

Integration of Cascaded Electro-Optic and Nonlinear Processes on a Lithium Niobate on Insulator Chip.

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Strong Nonlinear Optics In On-Chip Lithium Niobate Photonic Molecules Fabricated By Femtosecond Laser

Cascading second-order nonlinear processes in a lithium niobate-on-insulator microdisk.

Naturally Phase Matched Lithium Niobate Nanocircuits for Integrated Nonlinear Photonics

Nonlinear wave mixing in lithium niobate thin film

Integrated Lithium Niobate Platform for Nonlinear Optics and Electro-Optic Applications

Second and Cascaded Harmonic Generation of Pulsed Laser in a Lithium Niobate on Insulator Ridge Waveguide

Cascaded sum-frequency generation and electro-optic polarization coupling in the PPLNOI ridge waveguide

Phase Matched Second Harmonic Generation in an On-Chip Lithium Niobate Microresonator Fabricated by Femtosecond Laser

Efficient second harmonic generation by harnessing bound states in the continuum in semi-nonlinear etchless lithium niobate waveguides

Effective Four-Wave Mixing in the Lithium Niobate on Insulator Microdisk by Cascading Quadratic Processes

High-efficiency Nonlinear Frequency Conversion Enabled by Optimizing the Ferroelectric Domain Structure in X-Cut LNOI Ridge Waveguide

Heterogeneous Integration of Lithium Niobate and Silicon Nitride Waveguides for Wafer-Scale Photonic Integrated Circuits on Silicon.

Optimizing the Efficiency of a Periodically Poled LNOI Waveguide Using in Situ Monitoring of the Ferroelectric Domains

Wafer-Scale Periodic Poling of Thin-Film Lithium Niobate

Resonant Nonlinear Nanostructured Grating in an Unstructured Lithium Niobate on Insulator Platform

Efficient Simultaneous Second Harmonic Generation and Dispersive Wave Generation in Lithium Niobate Thin Film

Efficient parametric frequency conversions in lithium niobate nanophotonic chips