Abstract:Recent advancements in thin-film lithium niobate (TFLN) photonics have led to a new generation of high-performance electro-optic devices, including modulators, frequency combs, and microwave-to-optical transducers. However, the broader adoption of TFLN-based devices that rely on all-optical nonlinearities have been limited by the sensitivity of quasi-phase matching (QPM), realized via ferroelectric poling, to fabrication tolerances. Here, we propose a scalable fabrication process aimed at improving the wavelength-accuracy of optical frequency mixers in TFLN. In contrast to the conventional pole-before-etch approach, we first define the waveguide in TFLN and then perform ferroelectric poling. This sequence allows for precise metrology before and after waveguide definition to fully capture the geometry imperfections. Systematic errors can also be calibrated by measuring a subset of devices to fine-tune the QPM design for remaining devices on the wafer. Using this method, we fabricated a large number of second harmonic generation devices aimed at generating 737 nm light, with 73% operating within 5 nm of the target wavelength. Furthermore, we also demonstrate thermo-optic tuning and trimming of the devices via cladding deposition, with the former bringing ~96% of tested devices to the target wavelength. Our technique enables the rapid growth of integrated quantum frequency converters, photon pair sources, and optical parametric amplifiers, thus facilitating the integration of TFLN-based nonlinear frequency mixers into more complex and functional photonic systems.

Effective Four-Wave Mixing in the Lithium Niobate on Insulator Microdisk by Cascading Quadratic Processes

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

4-Quasi-phase-matched Interactions in GaAs Microdisk Cavities.

Strong Nonlinear Optics In On-Chip Lithium Niobate Photonic Molecules Fabricated By Femtosecond Laser

Cascading second-order nonlinear processes in a lithium niobate-on-insulator microdisk.

Effective multiband synthetic four-wave mixing by cascading quadratic processes

Nonlinear wave mixing in lithium niobate thin film

Cascaded degenerate four-wave mixing generation in thin-film lithium tantalate microdisk cavity

Phase Matched Second Harmonic Generation in an On-Chip Lithium Niobate Microresonator Fabricated by Femtosecond Laser

Cascaded multi-phonon stimulated Raman scattering near second-harmonic-generation in thin-film lithium niobate microdisk

Broadband Quasi-Phase-Matched Harmonic Generation in an On-Chip Monocrystalline Lithium Niobate Microdisk Resonator.

Enhanced four-wave-mixing with 2D layered graphene oxide films integrated with CMOS compatible micro-ring resonators

Simultaneous $ χ^{(2)} $- $ χ^{(2)} $ and $ χ^{(2)} $-$ χ^{(3)} $ nonlinear processes generation in thin film lithium tantalate microcavity

Scalable, fiber-compatible lithium-niobate-on-insulator micro-waveguides for efficient nonlinear photonics

High-efficiency Nonlinear Frequency Conversion Enabled by Optimizing the Ferroelectric Domain Structure in X-Cut LNOI Ridge Waveguide

Wavelength-accurate and wafer-scale process for nonlinear frequency mixers in thin-film lithium niobate

Waveguide-resonator Coupling Structure Design in the Lithium Niobate on Insulator for Χ （2） Nonlinear Applications