Abstract:Photonic integrated circuits based on Lithium Niobate have demonstrated the vast capabilities afforded by material with a high Pockels coefficient, allowing linear and high-speed modulators operating at CMOS voltage levels for applications ranging from data-center communications and photonic accelerators for AI. However despite major progress, the industrial adoption of this technology is compounded by the high cost per wafer. Here we overcome this challenge and demonstrate a photonic platform that satisfies the dichotomy of allowing scalable manufacturing at low cost, while at the same time exhibiting equal, and superior properties to those of Lithium Niobate. We demonstrate that it is possible to manufacture low loss photonic integrated circuits using Lithium Tantalate, a material that is already commercially adopted for acoustic filters in 5G and 6G. We show that LiTaO3 posses equally attractive optical properties and can be etched with high precision and negligible residues using DUV lithography, diamond like carbon (DLC) as a hard mask and alkaline wet etching. Using this approach we demonstrate microresonators with an intrinsic cavity linewidth of 26.8 MHz, corresponding to a linear loss of 5.6 dB/m and demonstrate a Mach Zehnder modulator with Vpi L = 4.2 V cm half-wave voltage length product. In comparison to Lithium Niobate, the photonic integrated circuits based on LiTaO3 exhibit a much lower birefringence, allowing high-density circuits and broadband operation over all telecommunication bands (O to L band), exhibit higher photorefractive damage threshold, and lower microwave loss tangent. Moreover, we show that the platform supports generation of soliton microcombs in X-Cut LiTaO3 racetrack microresonator with electronically detectable repetition rate, i.e. 30.1 GHz.

Cascaded degenerate four-wave mixing generation in thin-film lithium tantalate microdisk cavity

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Simultaneous $ χ^{(2)} $- $ χ^{(2)} $ and $ χ^{(2)} $-$ χ^{(3)} $ nonlinear processes generation in thin film lithium tantalate microcavity

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Strong Nonlinear Optics In On-Chip Lithium Niobate Photonic Molecules Fabricated By Femtosecond Laser

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

4-Quasi-phase-matched Interactions in GaAs Microdisk Cavities.

Cascading second-order nonlinear processes in a lithium niobate-on-insulator microdisk.

Phase Matched Second Harmonic Generation in an On-Chip Lithium Niobate Microresonator Fabricated by Femtosecond Laser

Wavelength-accurate and wafer-scale process for nonlinear frequency mixers in thin-film lithium niobate

Synthetic five-wave mixing in an integrated microcavity for visible-telecom entanglement generation

Nonlinear wave mixing in lithium niobate thin film

Lithium tantalate electro-optical photonic integrated circuits for high volume manufacturing

Efficient Frequency Doubling with Active Stabilization on Chip

Cascaded multi-phonon stimulated Raman scattering near second-harmonic-generation in thin-film lithium niobate microdisk

Broadband Quasi-Phase-Matched Harmonic Generation in an On-Chip Monocrystalline Lithium Niobate Microdisk Resonator.

Simultaneous Optical Parametric Oscillation and Intracavity Second-Harmonic Generation Based on a Hexagonally Poled Lithium Tantalate.

Efficient and temperature-tunable second-harmonic generation in a thin film lithium niobate on insulator microdisk

Advancing large-scale thin-film PPLN nonlinear photonics with segmented tunable micro-heaters

High-efficiency optical frequency mixing in an all-dielectric metasurface enabled by multiple bound states in the continuum