Design of THz Sub-Wavelength Antireflective Structure on Si Surface

Jun GOU,Yadong JIANG,Shaowei HE,Jun WANG,Pengjie CHEN,Weizhi LI
DOI: https://doi.org/10.16818/j.issn1001-5868.2014.04.014
2014-01-01
Abstract:Sub-wavelength structure(SWS)is defined as periodic structure that contains a pattern with smaller period size compared to light wavelength.The structure appears as a dielectric layer with homogeneous refractive index and the zero-order diffraction.In this paper,SWS was introduced based on effective medium theory and rigorous coupled-wave theory.In order to increase the transmission of terahertz(THz)radiation at wavelength of 111μm(2.7THz),SWS on Si surface was designed.The transmittance and reflectance of the structure depended on its period,height and filling factor.The parameters of the SWS were optimized by effective medium theory and rigorous coupled-wave theory.The results show that a transmittance of 99.05% was achieved by the SWS with a period of 27μm,a height of 13μm and a filling factor of 0.75.
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