Glow Discharge and Paschen Law

侯清润,茅卫红,陈宜保
DOI: https://doi.org/10.3969/j.issn.1005-4642.2004.01.001
2004-01-01
Abstract:The electrode voltage versus gas pressure in glow discharge is studied using the ion bombardment apparatus in the vacuum deposition system. The voltage is a function of gas pressure when the discharge current is kept constant. By changing the gas pressure, a minimal voltage is found. The relationship between electrode voltage and gas pressure can be explained by Paschen law.
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