Studies on Preparation and Applications of Lead-Free Piezoelectric Ceramic Films

LU Lei,XIAO Ding-quan,TIAN Jian-hua,ZHU Jian-guo
DOI: https://doi.org/10.3321/j.issn:1001-9731.2009.05.001
2009-01-01
Journal of Functional Biomaterials
Abstract:Preparation and applications of lead-free piezoelectric ceramics were one of the international active research areas since the middle of 1990's.In recent years,lead-free piezoelectric films have been promising used in information industry,sensor,aerospace,mechanical industry,biology,medicine and so on.Therefore the preparation and applications of the films have been concerned internationally.In this paper,combined with the authors' research work,the progresses of lead-free piezoelectric films are introduced,including the progresses of the lead-free piezoelectric ceramic films;the fabrication methods especially the RF magnetron sputtering,pulsed laser deposition and sol-gel process for lead-free piezoelectric films;and the potential applications for devices.
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