Flow and heat transfer characteristics in silicon-based microchannels with internal ribs

LIU Enguang,WU Huiying,TANG Huimin

DOI: https://doi.org/10.3321/j.issn:0438-1157.2009.08.006

2009-01-01

Abstract:At present,channels made of copper,aluminum or stainless steel are widely used for the heat transfer enhancement research,but the fabrication precision and size of these traditional channels are usually limited.In this paper,silicon-based microchannels with square internal ribs were made by the MEMS method,and their flow and heat transfer characteristics were experimentally investigated for the first time.It was shown that the flow and heat transfer characteristics were affected apparently by rib height and the distance between two neighboring ribs.When compared with the smooth silicon microchannels without internal ribs,both the friction factors and Nusselt numbers of the silicon microchannels with internal ribs increased,and the heat transfer enhancement performance of the silicon-based microchannels with internal ribs was mainly dependant on rib height and rib distance.The entrance effect on the flow and heat transfer in the silicon microchannels was obvious.