Fully digital smart temperature sensor with quartz tuning fork resonator

Jun XU,Bo YOU,Xin LI,Jing MA

DOI: https://doi.org/10.3321/j.issn:1004-924X.2009.06.044

2009-01-01

Abstract:In order to measure temperature in high-precision, a high-performance and fully digital smart temperature sensor is designed, which comprises a quartz tuning fork resonator,an interface with Complementary Metal Oxide Semiconductor(COMS ) and a controlling algorithm for sensor reconfiguration based on the Field Programmable Gate Array(FPGA). According to the piezoelectricity effect of a quartz, the thermosensitive cut for the quartz tuning fork resonator and the electrode configuration are analyzed,and the resonant differential equation of the quartz resonator working in a flexural vibrating mode is derived from mechanical vibration. Then,the design principle for the quartz tuning fork temperature sensor is discussed,and the characteristic parameter of temperature sensor is extracted.Finally, the nonlinear error of the sensor is analyzed. The quartz tuning fork resonator is fabricated by a photolithography and an etching technology, in which the frequency output is from the interface IC to FPGA and the special controlling algorithm may easily realize the sensor reconfiguration and the automatic calibration in the field. The experimental result indicates that the sensitivity of this sensor can reach 65×10-6/℃ at the temperature ranges from -20 ℃ to 140 ℃, which guarantees the precision of 0.01 ℃, the resolution of 0.001 ℃, and the response time of 1 s.