Abstract:In order to measure temperature in high-precision, a high-performance and fully digital smart temperature sensor is designed, which comprises a quartz tuning fork resonator,an interface with Complementary Metal Oxide Semiconductor(COMS ) and a controlling algorithm for sensor reconfiguration based on the Field Programmable Gate Array(FPGA). According to the piezoelectricity effect of a quartz, the thermosensitive cut for the quartz tuning fork resonator and the electrode configuration are analyzed,and the resonant differential equation of the quartz resonator working in a flexural vibrating mode is derived from mechanical vibration. Then,the design principle for the quartz tuning fork temperature sensor is discussed,and the characteristic parameter of temperature sensor is extracted.Finally, the nonlinear error of the sensor is analyzed. The quartz tuning fork resonator is fabricated by a photolithography and an etching technology, in which the frequency output is from the interface IC to FPGA and the special controlling algorithm may easily realize the sensor reconfiguration and the automatic calibration in the field. The experimental result indicates that the sensitivity of this sensor can reach 65×10-6/℃ at the temperature ranges from -20 ℃ to 140 ℃, which guarantees the precision of 0.01 ℃, the resolution of 0.001 ℃, and the response time of 1 s.

A high sensitivity quartz tuning fork temperature sensor

Analysis and Design of Thermo-Sensitive Quartz Tuning Fork Resonators for Temperature Sensors

Analytical And Finite Element Method Design Of Quartz Tuning Fork Temperature Sensor

Design and simulation of quartz tuning fork temperature sensor

Thermo-sensitive Quartz Resonator Based on Tuning Fork Technology

Study on quartz tuning fork resonator as micro temperature

Design, Modeling, and Simulation of Quartz-Crystal-tuning-fork-resonators-based Micro Temperature Sensor

Finite Element Method Design and Fabrication of Thermo-sensitive Quartz Tuning Fork Resonators as Temperature Sensor

Design, development and testing of quartz tuning fork temperature sensor

Optimal Design Of A High-Resolution Smart Temperature Sensor Using Quartz Tuning Fork Resonator And Experimental Test Of Samples

Development of quartz tuning fork temperature sensors

Smart temperature sensor with quartz tuning fork resonators

Calibration Of Quartz Tuning Fork Temperature Sensors

Development of an Ultra-Small Smart Temperature Sensor with Quartz Tuning Fork Resonators

Fully digital smart temperature sensor with quartz tuning fork resonator

Theoretical model and optimization of a novel temperature sensor based on quartz tuning fork resonators

Comparative Study of SAW Temperature Sensor Based on Different Piezoelectric Materials and Crystal Cuts for Passive Wireless Measurement

Quartz Tuning Fork Biosensor.

Ultra stable tuning fork sensor for low-temperature near-field spectroscopy

Sensitive Birefringent Temperature Sensor Based on a Waveguide Ring Resonator.