Nonlinear Variable-structure Control of Maglev Motion Stage

WANG Wei-ming,MA Shu-yuan,SHAN Ming-cai,ZHANG Yi
DOI: https://doi.org/10.3969/j.issn.1001-2265.2012.03.018
2012-01-01
Abstract:Magnetic levitation motion stage is applicable for precision measurement and positioning equipments due to advantages of non-contact,no friction and no abrasion.To achieve precision control for the maglev motion stage system which has strong coupling and nonlinear characteristics,a feedback exact linearization control method is proposed.Noninteractive control of the motion stage levitating position and horizontal position was realized.Variable-structure controllers were designed respectively according to different characteristics of vertical and horizontal directions.Simulation results show that this method is very effective in the decoupling of levitating drive and horizontal drive.In addition,the controllers have strong robustness.
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