Morphology and magnetic properties of vertically orientated continuous FePt films annealed at high temperature

XIANG Hui,MO XiaoJing,ZHENG YuanPing,Lü Qing,TAN XingWen,LIN YueQiang,XIONG ZuHong,LI GuoQing

DOI: https://doi.org/10.1360/972010-1424

2011-01-01

Chinese Science Bulletin

Abstract:By magnetron sputtering,[Fe(0.6 nm)/Fe30.5Pt69.5(1.9 nm)]10 continuous multilayer films with nominal composition of Fe50Pt50 and total thickness of 25 nm were deposited on MgO(001) substrates heated to 400°C,and then subjected to a vacuum annealing at temperatures in the range of Ta=[500,900]°C.The morphology,crystallography as well as magnetic property dependences of Ta were investigated by scanning electron microscope,atomic force microscope,X-ray diffraction and vibrating sample magnetometer.Heating the substrate during sputtering resulted in interlayer diffusion,and the as-deposited multilayer film showed the soft magnetic behaviors of FePt alloy with disordered A1 phase.Annealed at Ta≥700°C,the film became the ordered L10 phase with significant (001) orientation;the ordering parameter was more than 0.85;the magnetocrystalline anisotropic energy exceeded 2.7×107 erg/cc.Due to the residual subtle periodical compositional fluctuation in the film,the ordering could nucleate interior the film and the Pt-enrichment boundaries were sufficiently suppressed.The continuity of morphology was maintained at Ta≤800℃.The observation by atomic force microscope indicated that the film annealed at Ta=780°C had the flattest surface with sparse swells lower than 3 nm.This kind of heat-resisting continuous film would fit the need for microfabrication of patterned arrays of L10 FePt for applications such as the perpendicular magnetic recording media.