Phase Transformation Behavior of TiNi Based Shape Memory Alloy Films

Zhi-guo WANG,Xiao-tao ZU,Xiang-dong FENG,Hua-jun YU,Yong-qing FU
DOI: https://doi.org/10.3969/j.issn.1005-5053.2006.04.014
2006-01-01
Abstract:In this work,TiNi and TiNiCu shape memory alloy films on Si and SiO_2 substrate were successfully prepared by co-sputtering of TiNi target with a separated Cu and Ti target.The transformation behavior and stress as a function of temperature were investigated by differential scanning calorimeter(DSC) and curvature measurement methods.The results showed that the shape memory alloy film has a good shape memory effect,which was a promising candidate material for micro-electric mechanical system.For TiNi shape memory alloy film,two-stage transformation was observed,corresponding to transformations among austensite,R-phase and martensite phase.However,austensite transforms into martensite directly for TiNiCu film.The substrate and the composition of the film had a prominent effect on the transformation temperatures.The film had a good adherence on the Si substrate and is easy peeled from the SiO_2 substrate.
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