Design, pseudo-static model and PVDF-based motion sensing of a piezo-actuated XYZ flexure manipulator

Mingxiang Ling,Junyi Cao,Qisheng Li,Jian Zhuang
DOI: https://doi.org/10.1109/TMECH.2018.2871371
2018-01-01
IEEE/ASME Transactions on Mechatronics
Abstract:This paper develops a compact piezo-actuated XYZ flexure mechanism with an integrated polyvinylidene fluoride (PVDF) based displacement sensor. The sensing scheme is, by sticking a shaped PVDF film on the guiding flexible beams and using the kinematic relationship of the clamped-sliding flexible beam, widely available in compliant mechanisms. The optimal shape of PVDF is found by maximizing the se...
What problem does this paper attempt to address?