Abstract:Aluminum nitride (AlN)-on-Si MEMS resonators operating in Lamb wave modes have found wide applications for physical sensing and frequency generation. Due to the inherent layered structure, the strain distributions of Lamb wave modes become distorted in certain cases, which could benefit its potential application for surface physical sensing. This paper investigates the strain distributions of fundamental and first-order Lamb wave modes (i.e. S0, A0, S1, A1 modes) associated with their piezoelectric transductions in a group of AlN-on-Si resonators. The devices were designed with notable change in normalized wavenumber resulting in resonant frequencies ranging from 50 to 500 MHz. It is shown that the strain distributions of four Lamb wave modes vary quite differently as normalized wavenumber changes. In particular, it is found that the strain energy of A1-mode resonator tends to concentrate to the top surface of acoustic cavity as the normalized wavenumber increases, while that of S0-mode device becomes more confined in the central area. By electrically characterizing the designed devices in four Lamb wave modes, the effects of vibration mode distortion on resonant frequency and piezoelectric transduction were analyzed and compared. It is shown that designing A1-mode AlN-on-Si resonator with identical acoustic wavelength and device thickness benefits its surface strain concentration as well as piezoelectric transduction, which are both demanded for surface physical sensing. We herein demonstrate a 500-MHz A1-mode AlN-on-Si resonator with decent unloaded quality factor (Qu = 1500) and low motional resistance (Rm = 33 Ω) at atmospheric pressure.

High-temperature High-Sensitivity AlN-on-SOI Lamb Wave Resonant Strain Sensor

Dual-Resonator Lamb Wave Strain Sensor With Temperature Compensation And Enhanced Sensitivity

High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure

Novel Surface Acoustic Wave Temperature-Strain Sensor Based on LiNbO3 for Structural Health Monitoring

High-Temperature SAW Wireless Strain Sensor with Langasite

Novel Surface Acoustic Wave Strain Sensor with Enhanced High-Temperature Performance and Resistance to Aging

Investigation on Quasi Lamb Wave Modes in AlN-on-Si MEMS Resonators

Highly Sensitive Temperature Sensor Based on Coupled-Beam MN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

Flexible Surface Acoustic Wave Strain Sensor Based on Single Crystalline LiNbO3 Thin Film

Single-crystalline LiNbO3 Film Based Piezoelectric Sensors for Ultra-precision Pressure-sensing Applications

Strain Measurements with Langasite SAW Resonators at High Temperature

AlN/6H-SiC SAW resonator for high temperature wireless SAW sensor

Simulation and Experimental Study of SAW Temperature Sensor Based on ALN Piezoelectric Layer

Design of SAW Sensor for Longitudinal Strain Measurement with Improved Sensitivity

High Temperature SAW Sensors on LiNbO3 Substrate with SiO2 Passivation Layer

High Temperature Effects on Surface Acoustic Wave Strain Sensor

Flexible Dual-Mode Surface Acoustic Wave Strain Sensor Based on Crystalline LiNbO3 Thin Film

Large-Scale Strain Measurement of Micro-Specimens in High-Temperature Environments Based on Efpi

High-resolution, high-linearity temperature sensor using surface acoustic wave device based on LiNbO3/SiO2/Si substrate

Novel SAW Temperature Sensor with Pt/Ti/AlN/Mo/AlN/Si Structure for High Temperature Application

LiNbO3-Based SAW Sensors Capable to Measure Up to 1100°C High Temperature