Tribology dependence on both structures of bulk a-C:H:Si films and transfer layer via adjustable Si content
Junyan Wang,Zhaoyang Xing,Kaixiong Gao,Panfeng Yang,Chunlin Xu,Xin Wang,Zeng Lin
DOI: https://doi.org/10.1016/j.diamond.2023.110159
IF: 3.806
2023-06-30
Diamond and Related Materials
Abstract:Si doped hydrogenated amorphous carbon (a-C:H:Si) films were fabricated in mixed atmosphere of SiH 4 and Ar by magnetron sputtering methods, with different SiH 4 flow rates. The microstructures and tribological performances were measured by Atomic Force Microscopy (AFM), Scanning Electron Microscope (SEM), X-ray Photoelectron Spectroscopy (XPS), Raman Spectroscopy and Tribo-tests. The results showed that the as-fabricated a-C:H:Si films exhibited good tribological performances with low friction and wear. The -OH termination which was deduced by SiO structure inside the a-C:H:Si film reacted with water molecules in atmosphere could passivate the film and counterpart surface, leading to the low friction of a-C:H:Si film. The wear rate increased with the increase of SiH 4 gas flow rate, which could be attributed to the formation and increase of SiC phase with high hardness. The SiC phase enhanced the three-body abrasion between the contact surfaces, which increase the wear of the a-C:H:Si film at high SiH 4 flow rate.
materials science, multidisciplinary,physics, applied, condensed matter, coatings & films