Selective Sensing Of Chemical Vapors Using Phase Spectra Detection On Cvd Graphene Fet

Huiliang Liu,Yao Chu,Yumeng Liu,Takeshi Hayasaka,Nirav Joshi,Yong Cui,Xiaohao Wang,Zheng You,Liwei Lin

DOI: https://doi.org/10.1109/memsys.2018.8346521

2018-01-01

Abstract:This work marks the first use of phase spectra detection method to realize selective sensing of chemical vapors on a chemical vapor deposition (CVD) monolayer graphene field effect transistor (FET). Compared with the state-of-art technology, three distinctive advances have achieved: (1) first demonstration of selective gas sensing using the phase spectra detection method on a single CVD graphene FET without surface functionalization; (2) first demonstration of quantitative phase spectra detection results for four gas vapors (water, methanol, ethanol and isopropanol) with different concentrations; and (3) illustrations of the sensing selectivity by the extraction of phase spectra features with experimental validations by using the principal component analysis (PCA) scheme. As such, the proposed method of phase spectra detection can achieve gas sensing selectivity without surface functionalization or an array of devices.