Abstract:A wideband‐tunable silicon microwave photonic filter, which monolithically integrates a dual‐drive MachZehnder modulator, cascaded ultrahigh‐Q MachZehnder‐interferometer‐coupled microring resonators, and a photodetector, is demonstrated. The design shows a wide frequency‐tuning range of 2–40 GHz as well as a 3 dB bandwidth‐tuning range of 0.15–3 GHz. This work offers a promising option for high‐performance microwave photonics systems realization. Microwave photonic filters are a key fundamental subsystem in microwave photonics. A wideband‐tunable on‐chip microwave photonic filter (MPF), which monolithically integrates a dual‐drive Mach‐Zehnder modulator (DDMZM), is proposed with ultrahigh‐Q Mach–Zehnder‐interferometer (MZI)‐coupled microring resonators (MRRs) in cascade and a high‐speed photodetector (PD). It is the first time an MPF has been developed by introducing U‐bend‐MZI‐coupled MRRs whose resonance wavelength and 3 dB bandwidth are tunable. In particular, the ultrahigh‐Q U‐bend‐MZI‐coupled MRRs are realized with ultralow loss broadened silicon waveguides based on a modified Euler curve. For the fabricated U‐bend‐MZI‐coupled MRRs, which have an effective radius of 29 μm, the Q‐factor is as high as 1.3 × 106, while the free spectral range (FSR) is as large as 113 GHz. Furthermore, the introduction of two cascaded U‐bend‐MZI‐coupled MRRs enables the MPF to have flat‐top bandstop (or bandpass) responses with a high extinction ratio (ER) of 20–35 dB as well as a tunable 3 dB bandwidth of 0.15–3 GHz. Meanwhile, the central frequency can be tuned thermally from 2 to 40 GHz. The work provides a feasible route to realize a compact, high spectral resolution, and wideband‐tunable MPF on silicon, enabling a range of RF applications from wireless communication to flexible high‐frequency microwave photonic signal processing.

A Continuously Tunable Sub-Gigahertz Microwave Photonic Bandpass Filter Based on an Ultra-High-Q Silicon Microring Resonator

A Tunable Narrowband Microwave Photonic Bandpass Filter with an Ultra-high-Q Silicon Microring Resonator

Bandwidth and Wavelength Tunable Optical Passband Filter Based on Silicon Multiple Microring Resonators.

Tunable Microwave Photonic Filter Based on an Ultra-high-Q Mach–Zehnder Interferometer Coupled Microring Resonator

Tunable and Reconfigurable Microwave Photonic Bandpass Filter Based on Cascaded Silicon Microring Resonators

Wideband‐Tunable on‐Chip Microwave Photonic Filter with Ultrahigh‐Q U‐Bend‐Mach–Zehnder‐Interferometer‐Coupled Microring Resonators

Silicon-on-insulator-based Microwave Photonic Filter with Narrowband and Ultrahigh Peak Rejection.

Silicon Integrated Frequency‐tunable Microwave Photonic Bandpass Filter

Highly-integrated Microwave Photonic Bandpass Filter with Widely Tunable Range

A Multiband Microwave Photonic Filter Based on a Strongly Coupled Microring Resonator with Adjustable Bandwidth

Tunable and Reconfigurable Bandstop Microwave Photonic Filter Based on Integrated Microrings and Mach–Zehnder Interferometer

Tunable W-Band Microwave Photonic Filter with Ultra-High Quality Factor

Comparison analysis of microwave photonic filter using SOI microring and microdisk resonators

Ultrahigh Spectral Resolution Single Passband Microwave Photonic Filter.

Tunable Bandpass Microwave Photonic Filter with Ultrahigh Stopband Attenuation and Skirt Selectivity.

Wideband-tunable Integrated Microwave Photonic Filter Based on an Ultra-High-q Resonator

Silicon-on-insulator-based microwave photonic filter with widely adjustable bandwidth

A Silicon Photonic Integrated Frequency-Tunable Microwave Photonic Bandpass Filter

Ultracompact Optically-Controlled Tunable Microwave Photonic Filter Based on a Nonlinear Silicon Microring Resonator

Ultra-high Peak Rejection Notch Microwave Photonic Filter Using a Single Silicon Microring Resonator

All-Fiber-Optics-Based Microwave Photonic Filter with Tunable Center Frequency and Passband Plus Notch