Abstract:Third order, high-Q, micromechanical bandpass filters comprised of three ratioed folded-beam resonators coupled by flexural mode springs are demonstrated using an integrated circuit compatible, doped polycrystalline silicon surface-micromachining technology. A complete design procedure for multiresonator micromechanical filters is presented and solidified via an example design. The use of quarter-wavelength coupling beams attached to resonators at velocity-controllable locations is shown to suppress passband distortion due to finite-mass and process mismatch nonidealities, which become increasingly important on this microscale. In addition, low-velocity coupling methods are shown to greatly alleviate the lithographic resolution required to achieve a given percent bandwidth. Ratioed folded-beam micromechanical resonators are introduced as the key impedance transforming components that enable the needed low-velocity coupling. Using these design techniques, balanced three-resonator microscale mechanical filters with passband frequencies centered around 340 kHz are demonstrated with percent bandwidths of 0.1%, associated insertion losses as small as 0.1 dB, 20-dB shape factors as low as 1.5, and stopband rejections greater than 64 dB. Measurement and theory are rigorously compared and important limitations, such as thermal susceptibility, the need for passband tuning, and inadequate electromechanical coupling, are addressed.

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